MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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consider other conditions to be more critical than the factory configured interlocks.
Allowing the user to select this feature provides more flexibility for specific applications.
For example, the VaporGuard® 600 models can be set to not monitor probe installation.
Typically Stainless Steel (SS) applications are heated significantly above room
temperature. If the user wants to insure the probe cannot be removed during operation,
the temp low alarm can be interlocked. The user can specify at what deviation from the
set point the alarm will trip.
The maximum value for low temperature is 10°C below the set point. The reading
drops towards room temperature if the probe is removed. When the temperature drops
below the set point that is entered for the low temperature alarm, the power is removed
to the heater circuit to prevent the potential overheating condition.
5.4.2
Alarm Enable
The LCD display provides the capability to have the system ignore any non-hardwired
interlock alarm. When an alarm is disabled and it occurs, the alarm will not show on the
display nor will the “ANY ALARM” relay output change state.
5.4.3
Temperature Alarm
The alarm is activated when the monitored temperature is not within the tolerance of
the temperature set point (factory default is ±2°C). The tolerance parameter can be
changed via the keypad from ±10.0°C to ±0.1°C from the set point.
There are two alarms to high temperature. One does not have a relay output
associated with it (Temp High 2). This can be used as warning while the other (Temp
High 1) has an associated relay output for tool interface.
Keeping the alarm level at a tight tolerance could result in unnecessary or nuisance
alarm conditions during bubbling of chemical.
As a backup and to protect against runaway temperature condition beyond the alarm
limits, the probe has an independent, hard wired interfaced, thermal cutout to
automatically shut off the heater/cooler power to prevent bubbler over pressurization.
