MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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NOTE:
Failure of the Bubbler’s connections or breakage of the bubbler can result in
chemical spillage outside the VaporGuard®. To minimize personnel
exposure, recommend installing the VaporGuard® within an enclosure which
provides secondary containment.
The secondary containment space should be equipped with a spill sensor and
associated output that would alarm at the tool. The secondary containment should
be able to hold 110% of the amount of chemical in the bubbler. Mount secondary
container so it can easily be removed in the event of a spill to minimize chemical
exposure to personnel.
NOTE:
The user must consider appropriate ventilation for the specific application.
