Versum Materials 161133, Инструкция по установке, эксплуатации и обслуживанию

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MNL000420.doc Revision 11 04/08/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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2.2.3
Power Supply Module
The Power Supply Module provides the electrical power and necessary current control to
maintain a preset temperature and constant vapor pressure within the bubbler. The DDC
interface cable is connected to the Power Supply Module as well as the Remote Display
Module.
Table 2‐4 Power Supply Module ‐ Electrical Specifications
Input Power
(VG300 Model)
Input Voltage Range
100-240 VAC @ 50/60 Hz, 300 Watt
Output Power
(VG300 Model)
Heater: 13.6 VDC @ 4.6 A max. ( Trans-LC™)
Cooler: 10.5 VDC @ 6.2 A max. ( Trans-LC™)
Input Power
(VG600 Model)
Input Voltage Range
100-240 VAC @ 50/60 Hz, 600 Watt
Output Power
(VG600 Model)
Heater: 22 VDC @ 7 A max.
Cooler: 20 VDC @ 12 A max.
NOTE: VaporGuard® was evaluated to CE standard EN-61326-1 using heavy industry
EMC standards (radiated and conducted susceptibility) to insure that the
temperature will remain constant in all industrial installations.
Figure 2‐2 VaporGuard® Power Supply Module
Power Supply Module, VG300