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MNL000422.doc
Revision 1
09/06/2017
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page 4 - 17
Remote Stop signal, J5 - Pin 13 common to Pin 22 can be used as a hardware interlock to
remotely remove high current energy from the Source Cup Assembly in the event that the
system loses exhaust or vapors are detected greater than 25% LEL of the chemical.
The interface can be driven by a transistor (collector to Pin 13, emitter to Pin 22), opto-
coupler or a dry contact. Contact closed, or transistor/optoFET ON will trip this alarm. This
would remove power to high current loads.
However, the low power circuits will continue to operate for alarm logging purposes. A
closed contact on J5 - Pin 13 common to Pin 22 will send a logic low signal to a redundant
interlock circuit. This is a hardware interlock and will only clear when the Remote Stop
signal is reset (open circuit) by the return of cabinet exhaust or the absence of chemical
vapors greater than 25% LEL.
The processor monitors this input also and will generate an “ANY” alarm upon contact
closure. The Start/Stop switch activation is required to allow power to return to the high
current loads. The alarm must also be cleared from the LED display using the CLEAR
ALARM function in the menu.
4.5
Chemical Spill Cleanup
In dealing with chemical spills and/or mitigating releases associated with the
VaporGuard®, always use proper personal protective equipment, including gloves, face
and eye protection, respirators, and protective clothing. Due to various factors in each spill
incident, it has been determined unsafe to provide generic spill instructions for each type of
chemical being used. For example, two spills of the same type of chemical could have two
different spill procedures. Therefore, in the event of a spill, we recommend immediately
contacting Versum Materials, Inc. EH&S department at
610-481-4911
(Chemical
Emergency Option) for specific chemical spill instructions and environmental regulatory
information.
SDS for all Versum Materials, Inc. chemicals are available from Versum Materials, Inc.
EH&S department. In addition, consult your company’s environmental hazard/safety
procedures for specific
instructions to be followed in the event of a chemical spill. Also, if a chemical spill or
leakage comes in contact with the VaporGuard® proceed to section 4.7 for
decontamination.
