MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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*Electrically isolated connections to the VaporGuard® for the same alarm outputs in previous design. If tool currently incorporates isolation block (relay or opto PCA), this module may be removed from the tool assembly
as dry contacts are now available at these pins. Tool interface rewiring will be required.
**To comply with
Class 1 Division 2,
Pin 13 common to pin 22 can be used as a hardware interlock to remotely remove high current energy from the Source Cup Assembly in the event that the system loses exhaust or the
detection of >25% LEL of the chemical is detected. The interface can be driven by a transistor (collector to 13, emitter to 22), opto-coupler or a dry contact. The result in tripping this input would allow the low power display
to operate for alarm logging purposes, but the VaporGuard® will no longer control temperature. This is a hardware interlock and will only clear when the Remote Stop signal is reset by the return of exhaust flow and/or the
absence of chemical vapors >25% LEL. And the Start rocker switch is depressed on the front panel.
***Note, cable wire color matches DDC cable drawing sw004673.
