Chapter - 2
MNL000420.doc
Revision 11
04/08/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
3
Versum Materials Confidential
Table 2‐2
VaporGuard® Models, (refer to Chapter 6)
Part Number
VaporGuard® Model
Reference Drawing
161133
VaporGuard®, 300N
-300watt Power Supply Module
-Narrow Source Cup Assembly
SW004868
161134
VaporGuard®, 300W
-300watt Power Supply Module
-Wide Source Cup Assembly
SW003889
161135
VaporGuard®, 600N
-600watt Power Supply Module
-Narrow Source Cup Assembly
SW004040
161136
VaporGuard®, 600W
-600watt Power Supply Module
-Wide Source Cup Assembly
SW004050
163545
VaporGuard®, 600N, HT
-600watt Power Supply Module
-Narrow Source Cup Assembly
SW005426
163546
VaporGuard®, 600W, HT
-600watt Power Supply Module
-Wide Source Cup Assembly
SW005428
The VaporGuard® system consists of a Source Cup Assembly, a Power Supply Module
and an optional Remote Display Module. This modular design allows the Source Cup
Assembly to be installed into a hazardous location (Class 1, Division 2).
The Power Supply Module will be located outside the Class1, Division 2 location and
still provide the same control as it would if installed locally.
Class 1, Division 2 (hazardous) locations are established on the basis that the
equipment, in its normal operating condition, is incapable of causing an ignition of a
specified flammable gas, vapor in air mixture, dust or fibers.
