MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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48
6.
The VaporGuard® is now decommissioned and if applicable ready for relocation.
When placed back in to service, it is recommended to perform an operational
check on the system, refer to section 5.5..
7.
If the Source Cup Assembly was contaminated, dispose of it by the customers’
site discretion. This assembly cannot be refurbished or recycled. If this Source
Cup Assembly is under warranty, return it to Versum Materials, Inc. by utilizing
the proper shipping methods. Call Versum Materials, Inc. Equipment Technical
Services at
1-866-624- 7677
for additional information.
6.7
VaporGuard® Programming
On occasion a VaporGuard® will need to be updated with the latest software. A
VaporGuard® programmer (P/N 177118) is used to download the software. The
following procedure lists the steps necessary to download the software into the Source
Cup assembly and Power Supply Module with a VaporGuard® programmer.
NOTE:
The software for the Power Supply Module or Source Cup Assembly is
already be loaded on the programmer.
1.
Make sure the VaporGuard® is powered OFF.
2.
To program the Power Supply Module, plug the programmer in to connector J2.
3.
Turn VaporGuard® ON.
4.
Press the program button momentarily on the programmer. This should cause
the indicator light to shine yellow for approximately 7 seconds. This indicates that
it’s ready to program.
5.
Press the program button again to start programming, the indicator light will flash
yellow during this operation. When programming is complete, the verification
operation will begin. During this time the indicator light will flash green. Upon
completion of this operation, the indicator light will show a steady green,
indicating the download was successful. A steady red light would indicate that
the download had failed.
6.
Turn OFF VaporGuard® and remove programmer.
