MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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55
C O O L
I
N T G R A L
1 5 0
The same parameters can be modified for the cooling circuit. However, the cooling circuit
must have a different control from the heater PID for efficiency.
C O O L
D E R I
V A T
4 0 0
M A X .
T E C
1 9 0
5.7.10
Relay Manual Control
R E L A Y
M A N .
C N T R L
X = E X I
T
√ = E X E C U T E
A B C D E F G H I
J K L M N O P
L E V E L
4
R E L A Y
First line: Input status. When the relay output is high “1”, the related text will be upper
case; when the output is low “0”, the text will be lower case.
Second line: Description of the input. Moving the cursor left or right will change the
relay selection to the next input and the second line will display the description of the
input.
Moving the cursor to the desired replay output, and pressing “√” key will toggle the
relay.
