Versum Materials 161133, Инструкция по установке, эксплуатации и обслуживанию

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MNL000423.doc Revision 01 09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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5.5
Operating Instructions
This section provides instructions on operation of the VaporGuard®. The system will be
ready to operate after the following steps are performed.
5.5.1
Power Up
The Source Cup Assembly (interconnect) cable must be connected to the Power
Supply Module (J4) prior to energizing the VaporGuard®. Likewise all other cable
connections must be made and secured to the Source Cup Assembly and Power
Supply Module prior to applying AC power.
Once connections have been completed, the Power Supply Module “ON-OFF” switch
SW1 can be turned on. SW1 will be illuminated to indicate power-on condition.
During processor boot up, signals on the connector port pins are cycled. This causes
several signals to momentarily turn on. They are the backlight, the fan, the illuminated
Start/Stop switch and the buzzer. They will immediately turn off once the processor has
completed the normal boot routine. This is normal and will only occur during initial
power up.
The Start/Stop switch red LED will be on, as well as the display. This is an indication of
successful communication to the Source Cup Assembly. If no alarms exist, press the
START / STOP rocker to the START position to turn on the high power. The switch will
illuminate green if the system is OK to operate.
If alarms exist, correct the condition and navigate to CLEAR ALARM menu to clear the
alarms.
If the bubbler is not installed, or not installed properly, there will be a “Probe Not
Installed” alarm on the display. If the bubbler is installed into the Source Cup Assembly
and the probe is fully inserted into the thermowell, the bubbler needs to be rotated until
a short beep occurs. This is an indication that the bubbler is in the correct orientation
and the probe is fully installed into the thermowell.
Insure mineral oil has been added into the thermowell. Insert the bubbler into the
Source Cup Assembly and install the probe into the thermowell until it touches the
bottom. Listen for a short beep to indicate that the probe is installed correctly. Rotate