MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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6.6 Bubbler Installation
Installation consists of inserting the Bubbler in the Source Cup Assembly, connecting
the input and output lines and immersing the Temperature Probe into the thermowell.
Versum Materials, Inc. Bubblers are highly recommended for usage.
Refer to Versum Materials, Inc. Bubbler Installation and Removal Procedures,
PN
9901-0044
, which is provided with every Versum Materials, Inc. Bubbler. This
document is intended for the safe installation and removal of the quartz bubblers.
WARNING
The incoming gas pressure to the bubbler must not exceed 204.77 kPa (absolute
pressure) [15 psig (gauge pressure)] at any time.
Downstream from the Mass Flow controller (MFC) there is to be a “safety,” relief valve
to be activated at 204.77 kPa (absolute pressure) [15 psig (gauge pressure)].
Versum Materials, Inc. Bubblers are rated for a maximum operating pressure of 204.77
kPa (absolute pressure) [15 psig (gauge pressure)]. Installation of the appropriate
pressure relief devices is required.
All specified pressure regulation and overpressure protection is the responsibility of
end-user. When selecting overpressure protection it must be properly sized based on
line size, regulator CV and maximum inlet pressure setting to the regulators.