MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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6.4.3
Digital Inputs
The following display screen is accessible from the main menu. It can be used to
trouble shoot the interface connections by monitoring digital inputs from the tool and by
forcing relays on or off to the tool for interface verification.
D I
G I
T A L
I
N P U T S
X = E X I
T
√ = E X E C U T E
Pressing the green “√” key will produce the following screen.
Pressing the X returns to the previous menu.
A B C D E F G H I
J K L M N O P
S T A R T /
S T O P
First line: Input status. When the input is high “1”, the related text will be upper case;
when the input is low “0”, the text will be lower case.
Second line: The description of the input. Move the cursor left or right, the second line
will display the description of the input the cursor is pointing to. In the example above,
pressing the Start/Stop switch will change the “A” from upper case to lower case “a”.
6.4.4
Relay Manual Control
R E L A Y
M A N .
C N T R L
X = E X I
T
√ = E X E C U T E
A B C D E F G H I
J K L M N O P
A N Y
A L A R M