MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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6.3
Installation
6.3.1
Electrical Requirements
The VaporGuard® utilizes a built-in type switching power supply sub-assembly, which is
internal to the Power Supply Module that can accept 100 to 240VAC @ 50-60Hz. The
Power Supply Module is designed with a circuit breaker (5 Amp rating) and the built-in
power supply sub-assembly has a crowbar output that will prevent the internal fuses
from blowing. The electrical circuit into which the VaporGuard® is connected should be
designed for EMO shutdown with a minimum interrupting capacity of 5000 rms
symmetrical amps. The EMO device should be accessible to the operators, marked as
the disconnecting device for the VaporGuard®, and must have the on/off position
clearly marked for the operator.
WARNING
WARNING: AC power must be provided as required by applicable codes and standards.
Where local laws allow AC LINE and AC NEUTRAL to be connected in either polarity, Versum
Materials, Inc. recommends installing a GROUND FAULT CIRCUIT INTERRUPT (GFCI)
protection.
WARNUNG: Die Wechselstromversorgung muß den jeweiligen Vorschriften und Normen
entsprechen. Soweit lokale Vorschriften das Zusammenführen von wechselstromführenden
und Neutralleitern in beiden Polaritäten zulassen, empfiehlt die Fa. Versum Materials, Inc. die
Installation eines Sicherheitserdungsschalters
.
