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MNL000418.doc

Revision 00

08/26/2016

Confidential and Proprietary Data

Page

PWR

Power

SEMI

Semiconductor Equipment and Materials International

SIS

Shipping Identification Sheet

S. S.

Stainless Steel

TEC

Thermo Electric Cooler

TEOS

Tetraethyl Orthosilicate

TDMAT

Tetrakis-dimethylamino Titanium

TiCl4

Titanium Tetrachloride

TOMCATS

Tetramethylcyclotetrasiloxane

Trans LC™ (TLC)

Trans-1, 2-Dichloroethylene

UPS

Uninterrupted Power Supply

Ultrasonic Probe

USFL

Ultrasonic Probe Failure

USIL

Ultrasonic Probe Interlock

VAC

Volts, Alternating Current

VaporGuard®

VaporGuard® Absolute Control System

VDC

Volts, Direct Current

I.4

Some of the Approved Chemicals

Chemical

Recommended Source
Container

Recommended

VaporGuard®

Trans LC

1.5L Quartz Bubbler

VG300N or W

BBr3

1.5L Quartz Bubbler

VG300N or W

POCL3

1.5L Quartz Bubbler

VG300N or W

TDMAT

1.2L S.S. Container

VG600N or W

TEOS

1.2L S.S. Container

VG600N or W

TICL4

1.2L S.S. Container

VG600N or W

Note:

For additional chemical use please consult with your local Versum Materials,
Inc. representative.

Содержание 161133

Страница 1: ...the revision and date shown All rights reserved Confidential and Proprietary Data Versum Materials Confidential Installation Operation Maintenance Manual VaporGuard Absolute Control System Manual Part...

Страница 2: ...without prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc makes no representation that the information...

Страница 3: ...ic calibration In no event shall Versum Materials be liable for any incidental indirect or consequential damages in connection with the purchase or use of any Versum Materials product This warranty sh...

Страница 4: ...e Chapter 2 System Components and Specifications Rev 1 MNL000420 doc Added note on maximum temperature specification in table 2 1 Chapter 3 VaporGuard Absolute Control System For Use With Trans LC Rev...

Страница 5: ...4 I 4 Approved Chemicals I 5 Chapter 1 Delivery Unpacking and Inspection 1 1 1 1 Delivery 1 1 1 2 Unpacking 1 1 1 3 Inspection 1 1 Chapter 2 System Components and Specifications 2 1 Equipment and Feat...

Страница 6: ...ight for Sight Glass 5 5 5 2 3 Heater Cooler START STOP Power Switch 5 5 5 2 4 Liquid Level Alarm Quartz Bubbler 5 6 5 2 5 Liquid Level Alarm Stainless Steel Source Container 5 9 5 2 6 No Liquid Level...

Страница 7: ...ime 5 23 5 6 10 Raw Analog Input 5 23 5 6 11 Digital Inputs 5 23 5 6 12 Fan and Ambient Temperature 5 24 5 6 13 Bar Light 5 24 5 6 14 Save Change 5 24 5 6 15 System Config 5 25 5 6 16 Lid Heater not a...

Страница 8: ...EMI RFI Protection 6 13 6 3 6 Thermowell Oil 6 13 6 3 7 VaporGuard Fan Clearance 6 13 6 3 8 Cables 6 14 6 3 9 Cable Installation Procedure 6 14 6 4 Tool Interface Connection 6 15 6 4 1 Installing the...

Страница 9: ...2 4 Analog Output Calibration Procedure 7 4 7 2 5 Voltage Output Calibration 7 4 7 2 6 Verification Without Calibration 7 5 7 3 Safety Test 7 6 7 4 Maintenance schedule 7 7 7 5 Spare Parts List 7 8 Ch...

Страница 10: ...t to setup and operation of the VaporGuard Inspect all shipping containers that are delivered with your shipment to verify that all parts are available and to acquaint yourself with the system compone...

Страница 11: ...0 481 4911 European Community Middle East Gases 44 500 02 02 02 Equipment Technical Support 866 624 7677 I 3 Definition of Terms I 3 1 Definitions There is no industry standard term for the source con...

Страница 12: ...ie de conditions sp cifiques doivent tre maintenues ou evit es afin d emp cher tout d g t l quipement ou la zone d op ration WARNING This is an example of a WARNING A WARNING notifies the reader that...

Страница 13: ...rrupt Capacity cfm Cubic Feet per Minute ERR Error DC Direct Current DDC Direct Digital Controller Tool IO Interface EMO Emergency Manual Off gr gram He Helium I D Inner Diameter ID Identification in...

Страница 14: ...Introduction P N Part Number POCl3 Phosphorus Oxychloride PPE Personal Protective Equipment Psia pounds per square inch absolute Psig pounds per square inch gauge...

Страница 15: ...MCATS Tetramethylcyclotetrasiloxane Trans LC TLC Trans 1 2 Dichloroethylene UPS Uninterrupted Power Supply US Ultrasonic Probe USFL Ultrasonic Probe Failure USIL Ultrasonic Probe Interlock VAC Volts A...

Страница 16: ...shipped in one packing box The packing slip on the outside of the carton indicates the number of items in the order A separate packing checklist included with the manual identifies all components in...

Страница 17: ...ncluded in the shipment Notify Versum Materials Inc if any item is not include or damaged Check the VaporGuard for loose connections 2 There is a 30 day limit upon receipt of order for reporting missi...

Страница 18: ...1 Versum Materials Confidential Chapter 2 System Components and Specifications This chapter describes the module specifications for the VaporGuard All models that are described in this manual are for...

Страница 19: ...benchtop conditions Actual maximum temperature is molecule and application dependent In most cases 80 90C is appropriate Existing ATCS VaporGuard Models Temperature Range Equivalent Model Temperature...

Страница 20: ...ource Cup Assembly SW004050 163545 VaporGuard 600N HT 600watt Power Supply Module Narrow Source Cup Assembly SW005426 163546 VaporGuard 600W HT 600watt Power Supply Module Wide Source Cup Assembly SW0...

Страница 21: ...tal Control DDC compatible with existing ATCS applications and can be used as a drop in replacement The Remote Display Module optional it allows for the user to install the display up to 5 feet away f...

Страница 22: ...heater cooler circuit 24VDC Remote AC power supply 100 240VAC 50 60Hertz Configurable relay outputs 8 discrete level sense positions Each level position can be configured for any one of the four dedic...

Страница 23: ...erface DDC cable The Source Cup Assembly equipped with a thermal cut out switch that will open at factory configurable temperatures of 28 C 70 C 100 C 120 C depending on model ordered The Source Cup A...

Страница 24: ...orGuard Physical Specifications Height Source Cup Assembly w o Bubbler Power Supply Module 12 75 in 323 9mm 12 75 in 323 9mm Width Source Cup Assembly Power Supply Module 9 2 in 233 7 mm 9 2 in 233 7m...

Страница 25: ...20 doc Revision 11 04 08 2019 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 Versum Materials Confidential Figure 2 1 VaporGuard Sy...

Страница 26: ...e heater offsets the effect of the cooler to attain the temperature within the specified range A multiple conductor cable connects the Source Cup Assembly to the Power Supply Module providing current...

Страница 27: ...cted to the Power Supply Module as well as the Remote Display Module Table 2 4 Power Supply Module Electrical Specifications Input Power VG300 Model Input Voltage Range 100 240 VAC 50 60 Hz 300 Watt O...

Страница 28: ..._______________________________________________________ MNL000420 doc Revision 1 1 04 08 2019 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Da...

Страница 29: ...he ATCS 15 TLC and ATCS 15 TLCHFCK models The main difference between this model and the others is the over temperature protection circuit and lower heater cooler power limits The over temp interlock...

Страница 30: ...side of the user adjustable min max temperature settings temp low 1 2 temp high 1 2 an alarm is generated If configured to be an interlocked alarm it will also remove the power to the heater cooler ci...

Страница 31: ...tors be connected or disconnected while the equipment is energized WARNING WARNUNG EXPLOSIONSGEFAHR In der Reglereinheit befinden sich Funken oder Z ndquellen Die Reglereinheit mu vom Betreiber an ein...

Страница 32: ...end user or OEM tool manufacturer to insure safe handling of Trans LC by installing certain safeguards Noncompliance with these safeguards could result in hazardous conditions including loss of contai...

Страница 33: ...and all chapters of the manual completely before handling chemical The minimum personal protective equipment required for operating and maintaining the VaporGuard system is dependent on the hazard cat...

Страница 34: ...served Confidential and Proprietary Data WARNING Explosion Hazard Substitution of components may impair suitability for use in Class 1 Division 2 environments WARNING Explosion Hazard The area must be...

Страница 35: ...afety Labels Insure that these labels in figure 4 1 4 2 and 4 3 are installed on the side opposite of fan of the Source Cup Assembly The labels are categorized into groups Danger defines a situation t...

Страница 36: ...igure 4 1 This label in Fig 4 1 informs the user of the hazards associated with the use of this equipment using Trans LC and the consequences of not adhering to the warning Trans LC is a flammable cor...

Страница 37: ...As such efforts must be taken to eliminate all spark sources as they may ignite the vapors To avoid this hazard the user should never remove cables from the VaporGuard while it is energized The figur...

Страница 38: ...here are heated parts inside the assembly The Source Cup Assembly contains electronic circuits that could present an electrical burn hazard if the cover is removed and also has a heated surface that c...

Страница 39: ...side of the Power Supply Module The Power Supply Module contains electronic circuits that could present a hazard of electrical shock if the cover is removed The user is informed that there is no reaso...

Страница 40: ...5 and Figure 4 6 are displayed on the side panel of the Source Cup Assembly for the standard VaporGuard models This label indicates that the Source Cup Assembly has been approved for use in hazardous...

Страница 41: ...reserved Confidential and Proprietary Data The Chassis Ground Label in figure 4 7 is displayed on the top side of the Source Cup Assembly next to the grounding lug Figure 4 7 The Hot Surface Label in...

Страница 42: ...he revision and date shown All rights reserved Confidential and Proprietary Data The RoHS Compliant Label in figure 4 9 is displayed on the side panel of the Source Cup Assembly and on the lid side of...

Страница 43: ...l in Figure 4 10 and 4 11 are located on the Source Cup Assembly These labels indicate that the Source Cup Assembly has been approved for use in the hazardous locations within the United States Models...

Страница 44: ...structed with the appropriate features in order to safely operate in the VaporGuard Refer to Chapter 5 for system operation on the individual interlock circuits Table 4 1 Alarm Interlocks Alarm Names...

Страница 45: ...ed No Communication no enabled no interlocked Bad Communication yes enabled yes not interlocked Thermal Tripped no enabled selectable no interlocked Cable Code I Lck no enabled no interlocked Ambient...

Страница 46: ...in thermowell of source container Error message Probe not installed flashes on LCD audible illuminated switch flashes and DDC alarms generated Heater cooler circuit is disabled Install Temperature Pro...

Страница 47: ...will be green when off it will be red When an alarm condition exists the switch will flash red Use Start Stop switch to remove power to the circuit or to start system in control 4 4 Hazardous Locatio...

Страница 48: ...MNL000422 doc Revision 1 Page 4 16 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Figure 4 12 Power Supply Module J5 DDC Cable Connector...

Страница 49: ...this input also and will generate an ANY alarm upon contact closure The Start Stop switch activation is required to allow power to return to the high current loads The alarm must also be cleared from...

Страница 50: ...les and dispose of them by the customers site discretion Obtain new cables reference parts list in section 7 5 4 Disconnect the gas lines from each valve and then carefully remove the container from t...

Страница 51: ...ntained by a microprocessor control system The control system incorporates thermo electric coolers TEC and a heating element Both cooling and heating modes are controlled by the microprocessor and adj...

Страница 52: ...09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 Figure 5 1 VaporGuard System Remote Display Module Optional Power Supply...

Страница 53: ...figuration 5 1 1 Power Supply Module Overview The Power Supply Module microprocessor controls the following functions Monitors the analog to digital converter inputs for all peripheral I O Remote anal...

Страница 54: ...Page 4 The analog signals monitored by the power supply include remote set point DDC J 5 Note the pressure transducer input J 2 and mass flow input output J 8 are currently not available NOTE The pre...

Страница 55: ...ation Fan speed monitoring Communication and alarm status monitoring from the power supply processor Heater cooler power safety interlock for over temperature and correct bubbler orientation probe ins...

Страница 56: ...a keypad is used as the user interface Display for temperature and alarm messages as well as inputting setup parameters are accessible through the user interface An entire section User Interface at t...

Страница 57: ...o program the length of time the backlight will remain on after pressing the green check mark button Factory default is 1 minute and can be adjusted to 50 minutes in increments of 1 minute 5 2 3 Heate...

Страница 58: ...MNL000423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 Figure 5 3 START STOP Power Switch Model VG600...

Страница 59: ...rocker switch to the START position to return to normal operation There may be situations where the red light will be flashing and the green light will be on This means that the unit is still in cont...

Страница 60: ...00423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 Figure 5 4A Source Cup Assembly with Level Detect...

Страница 61: ...MNL000423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Figure 5 4B Level Detect Positions...

Страница 62: ...Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 12 Figure 5 4C Level Line of Sight Transmit PCA Line of sight...

Страница 63: ...nfiguration screen for the four other levels Once a Low Chem Level alarm is activated the he bubbler should be replaced as soon as possible to prevent the bubbler from going empty NOTE Attaching label...

Страница 64: ...58 W 1059 57 Level 2 03 5 16cm Chemical level below top 4 level sensors 1060 W 1255 68 Level 2 53 6 43cm Chemical level below top 3 level sensors 1256 W 1414 80 Level 3 03 7 7cm Chemical level below t...

Страница 65: ...al and Proprietary Data Page 15 5 2 6 No Liquid Level There is an additional option in the Config Sys menu to select NO LEVEL for containers that do not have level sense capabilities Once selected the...

Страница 66: ...measurement which are over temp interlock and proximity sensor interlock The thermal cutout circuit will interlock the heater cooler power in an over temperature condition independent of processor co...

Страница 67: ...MNL000423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 17 Figure 5 5 Temperature Probe Circuit...

Страница 68: ...re than 40 an alarm will occur 5 3 Power Supply Module Detailed Description The integrated built in switching power supply sub assembly requires a single connection to a TYPE IEC plug specified for 10...

Страница 69: ...MNL000423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 19 Figure 5 6 Power Supply Module Internal View...

Страница 70: ...Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 20 Figure 5 7a Model 600 Power Supply Module Back Panel Not Used Programming Port Interconnect Cable C...

Страница 71: ...age logic will result when J5 Pin 2 25 pin DB connector is shorted to ground 5 3 2 Remote Temperature Set Point This input allows a 0 to 5 VDC to be input for remote control of temperature set point w...

Страница 72: ...in the same scale Likewise 1 VDC output corresponds to a temperature reading of 22 C independent of the maximum control temperature of each model 5 3 4 Remote Display Module The Remote Display Module...

Страница 73: ...h will change from a solid green LED on the top half of switch to solid red on bottom of the switch If the alarm is defined by the power module processor to be a safety condition then the green LED wi...

Страница 74: ...heater circuit to prevent the potential overheating condition 5 4 2 Alarm Enable The LCD display provides the capability to have the system ignore any non hardwired interlock alarm When an alarm is d...

Страница 75: ...s appropriate for the VaporGuard model purchased WARNING The maximum activation temperature of the High Temperature Cutout Switch must be below 80 of the auto ignition temperature of the chemical bein...

Страница 76: ...ly turn off once the processor has completed the normal boot routine This is normal and will only occur during initial power up The Start Stop switch red LED will be on as well as the display This is...

Страница 77: ...s the right arrow once and press the center green check button Press the down arrow repeatedly until the screen prompts to CLEAR ALARM Press the center button again and the alarm will be cleared from...

Страница 78: ...y with a precise traceable RTD simulator and can be easily calibrated in the field if required with the purchase of a Temperature Calibration PCA used to simulate several different temperatures refer...

Страница 79: ...ed at the end of this section for testing the level sense probes with the bubbler removed A Template must be cut out and traced over with a thicker darker card stock material Inserting the card stock...

Страница 80: ...shown All rights reserved Confidential and Proprietary Data Page 30 Figure 5 9 Template for Testing Quartz Level Sense 100 91 80 68 57 46 34 23 P N 1740 3406 5 6 User Interface This section describes...

Страница 81: ...sing the left right arrow keys to navigate through menus Pressing the green key in the center of the arrow keys executes that screen selection To cancel a selection or return to a higher level menu pr...

Страница 82: ...rocker switch on the front panel The numbers adjacent to SP is the current set point of the temperature controller The set point parameter will be replaced by any alarm text message The number on the...

Страница 83: ...shown below In the event of an alarm the display will change to show temperature and level on the top row and the alarm condition on the bottom row The user can decide which format is best for their...

Страница 84: ...e cleared from the display for approximately 5 seconds If the alarm condition no longer exists the system will operate normally otherwise the alarm message will reappear C L E A R A L A R M S X E X I...

Страница 85: ...E R P A S S W O R D L O G G I N G 1 9 6 9 If the user attempts to re enter the password screen and it has already been entered the following screen will allow the user to log out Selecting the X will...

Страница 86: ...the display in the MAIN SCREEN The VaporGuard will continue to operate normally If the auto logout feature does occur simply re enter the password as described above 5 6 6 History Alarms H I S T O R...

Страница 87: ...prietary Data Page 37 From within the Display Screen the user has five different selections They are the software version screen date and time screen raw analog readings screen digital inputs and fan...

Страница 88: ...een See Config Sys section for details on changing the time date fields D A T E T I M E X E X I T E X E C U T E D A T E 0 9 1 5 1 4 T I M E 1 0 0 7 2 9 5 6 10 Raw Analog Input These data points repres...

Страница 89: ...s reserved Confidential and Proprietary Data Page 39 U P A R R O W C H 0 C H 3 5 6 11 Digital Inputs D I G I T A L I N P U T S X E X I T E X E C U T E Pressing the green key will produce the following...

Страница 90: ...display the description of the input the cursor is pointing to This display is useful when troubleshooting the tool interface 5 6 12 Fan and Ambient Temperature The fan speed should be around 80 RPM...

Страница 91: ...creen then select Execute whenever they are changed in order to store the value in memory It is recommended to save parameters and settings every time any changes have been made S A V E C H A N G E S...

Страница 92: ...B U Z Z E R O F F E N T E R T O C H A N G E Using the right or left arrow keypad will scroll through the other setup parameters S P L O C A L 2 5 0 E N T E R T O C H A N G E Pressing the green key wil...

Страница 93: ...ange of control When in remote set point mode the local LCD settings will be ignored The main menu on the local display will indicate that the set point is in remote control NOTE If the system is equi...

Страница 94: ...through the other setup parameters 5 6 16 Lid Heater Not available This factory default for this value is OFF L I D H E A T E R O F F E N T E R T O C H A N G E 5 6 17 Main Screen Second Line Selection...

Страница 95: ...D U C T S E L E C T X E X I T E X E C U T E The user may select between Regular Trans LC with maximum set point 22 C POCl3 maximum set point 26 C Cable Code Trans LC with maximum set point 20 C These...

Страница 96: ...W C H E M L E V E L N O T I N T E R L O C K E D Pressing the green key will toggle the alarm from INTERLOCKED to NOT INTERLOCKED L O W C H E M L E V E L I N T E R L O C K E D 5 6 21 Alarm Enabled When...

Страница 97: ...gle the alarm from ENABLED to DISABLED L O W C H E M L E V E L D I S A B L E D 5 7 Parameters and Limits Using the right or left arrow keypad will scroll through the next setup parameter Within this m...

Страница 98: ...T E M P H I G H 1 C T E M P H I G H 2 C The user may adjust the HIGH1 and HIGH2 temperature alarm trip points from this menu The range for the HIGH1 and HIGH2 alarm limit value is 0 5 to 10 C in 0 1 C...

Страница 99: ...larm when the bubbler temperature measurement is equal to or less than this temperature limit TEMP LOW1 has a corresponding relay output for remote annunciation TEMP LOW2 does not TEMP LOW2 can be a h...

Страница 100: ...signal has the same flexible features as the other four levels but it is linked to the ANY ALARM output and will show up on the LCD NOTE The lowest value that can be entered for LOW CHEM LEVEL is 23 U...

Страница 101: ...ock The system was designed with a real time clock to support the data acquisition time stamp C H A N G E C L O C K X E X I T E X E C U T E D A T E 0 9 1 5 1 4 T I M E 1 0 0 7 2 9 5 7 7 Default Setups...

Страница 102: ...Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 52 CAUTION If the Default Setup is executed all parameters must be reselected again accordingly Contact...

Страница 103: ...ic centimeters per minute sccm and the default is 250 sccm For high flow such as 1000sccm it is important that this flow setting be set to the actual flow rate so that the temperature control may resp...

Страница 104: ...d A summation if taken in small enough increments will give rise to an integral for t 0 to t IRT Aside from the IRT the other parameter which can be changed is the gain factor The heater PID loop is u...

Страница 105: ...M A X T E C 1 9 0 5 7 10 Relay Manual Control R E L A Y M A N C N T R L X E X I T E X E C U T E A B C D E F G H I J K L M N O P L E V E L 4 R E L A Y First line Input status When the relay output is...

Страница 106: ...ow or equal to for low level activation Heater failure Source Cup Assembly Processor driven TEC Heater failure Source Cup Assembly Processor driven TEC Cooler failure Source Cup Assembly Processor dri...

Страница 107: ...ccurrence with a connected faulty Ultrasonic Level Sense Probe Ultrasonic Interlocked Source Cup Assembly Model VG600 communication error from a non connected Ultrasonic Level Sense Probe Level No Con...

Страница 108: ...on The following table defines the temperature cutouts and the maximum set point value for the various dip switch configurations used by the different models The circuit is accurate to 0 5 C and has a...

Страница 110: ..._____________________________________________________________ MNL000423 doc Revision 01 09 18 2018 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprieta...

Страница 111: ...the integral components Also shown are the dimensions for securing the system onto a shelf The recommended placement height for the Source Cup Assembly is between 35 88 9 cm and 50 127 cm above the fl...

Страница 112: ...ecommend installing the VaporGuard within an enclosure which provides secondary containment The secondary containment space should be equipped with a spill sensor and associated output that would alar...

Страница 113: ...doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 Figure 6 1 Source Cup Seismic Mounting Holes Dimensions...

Страница 114: ...res 6 1 and 6 2 provide the dimensions for seismic mounting for both the Power Supply Module and the Source Cup Assembly The recommended installation side is the view on the right in figure 6 2 above...

Страница 115: ...ietary Data Page 5 PEM fasteners are for 6 32 screws The screw should not penetrate more than 0 634 cm into assembly Increase length of screw to account for varying shelf thickness NOTE If the unit is...

Страница 116: ...Data Page 6 Figure 6 3 Mounting Holes Dimensions inches mm Once installed the user may pull the Source Cup Assembly by the handles on the top of the Source Cup Assembly The PEM s are for 6 32 screws T...

Страница 117: ...on and date shown All rights reserved Confidential and Proprietary Data Page 7 NOTE The purpose of the handles are for pulling or pushing the Source Cup Assembly once its shelf mounted They re not int...

Страница 118: ...mum space requirement of 24 above the Source Cup Assembly for connection of cables gas lines and for replacement of the container Also allow spacing approx 6 x 6 for hand access to the control panel s...

Страница 119: ...Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 Figure 6 5 Space Requirements Stainless Steel Source Contain...

Страница 120: ...00424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 Figure 6 6 Source Cup Assembly wide version inches...

Страница 121: ...0424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Figure 6 7 Source Cup Assembly narrow version inche...

Страница 122: ...MNL000424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 Figure 6 8 Power Supply Module inches mm...

Страница 123: ...L000424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 Figure 6 9 Power Supply Module 300watt inches mm...

Страница 124: ...MNL000424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Figure 6 10 Remote Display Module inches mm...

Страница 125: ...gned for EMO shutdown with a minimum interrupting capacity of 5000 rms symmetrical amps The EMO device should be accessible to the operators marked as the disconnecting device for the VaporGuard and m...

Страница 126: ...enol brand EMI filter is included with each CE marked VaporGuard This filter will help eliminate RF interference when plugged into connector J3 on the Source Cup Assembly Remove this filter when J3 is...

Страница 127: ...6 inches is unattainable the customer should select a location that gives the VaporGuard the most clearance 6 3 8 Cables CAUTION Use of a cable with an incorrect part number could create a hazardous...

Страница 128: ...old separately See Spare Part List in chapter 7 Temperature Probe assembly connects to the top of the Source Cup Assembly There is only one probe design used for all VaporGuard models The 7 6 meter 25...

Страница 129: ...A2 designation are not part of the PCAs They are part of the interconnecting cables that attach from the external panel mount connector to the PCAs The A1 and A2 reference designators are only for cla...

Страница 130: ...0424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 17 Figure 6 12 Optional Interconnect Split Cable PN 18...

Страница 131: ...r return A4 Heater Voltage Heater power 1 24V system power input Power for electronics 10 Signal ground 24V return 2 RS485 OUT1 Comm link output 11 RS485 OUT2 Comm link output 3 24VDC switched Auxilia...

Страница 132: ...ts reserved Confidential and Proprietary Data Page 19 Table 6 2 Remote Display Communication Interface Remote Display Communication Port A1J3 Pin Signal name Remote Display pin 1 5VDC 1 2 Signal groun...

Страница 133: ...t Analog input 1 2 GNDA Analog ground 3 15VDC Analog power supply 4 GNDA Analog ground 5 GNDD Digital signal ground 6 5VDC Processor power 7 PDI Downloading port pin 8 GNDD Digital signal ground 9 GND...

Страница 134: ...ce The VaporGuard provides a jumper to remove or add the 5VDC output If the application requires an open collector output the 5V pull up adds no value and can be eliminated If the user requires the 5V...

Страница 135: ...oc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 22 Figure 6 13 ATCS15 DDC Interface Shielded Cable Assembly...

Страница 136: ...0 VDC when an alarm occurs PIN 16 ANY ALARM This output provides a signal if either the temperature is exceeded from set point or the level of chemical reaches less than percent value entered in the...

Страница 137: ...his input can be used to remotely control the temperature set point of the Source Cup Assembly from a computer or DDC 0 5 VDC equals 0 C 110 C PIN 2 DDC Grounding this input results in an inversion of...

Страница 138: ...des an open or closed contact if the temperature exceeds the set point by the specified number in the set up screen in C for Temp High 1 and Temp Low 1 The contact is closed when no alarm condition ex...

Страница 139: ...set point PIN 17 5 LEVEL 2 ALARM Relay K3 This output provides an open or closed contact if the level of chemical in the Bubbler goes below Level 2 set point selected in the set up screen The contact...

Страница 140: ...ing the green key will produce the following screen Pressing the X returns to the previous menu A B C D E F G H I J K L M N O P S T A R T S T O P First line Input status When the input is high 1 the r...

Страница 141: ...cursor pointing input Moving the cursor to the desired replay output and pressing key will toggle the relay In the example above the highlighted letter will change from upper case F to lower case f w...

Страница 142: ...n and date shown All rights reserved Confidential and Proprietary Data Page 29 L Fan Turns Source Cup Assemblies Fan Motor On Off M Start light Turns Green segment Source Cup Assemblies power switch O...

Страница 143: ...the revision and date shown All rights reserved Confidential and Proprietary Data Page 30 Figure 6 14 Source Cup Assembly Connecter Designations Ultrasonic Probe Connector Magnet Lid Heater Connector...

Страница 145: ...A2J7 DB9 female Pin Signal name Description 1 Smart_Probe_In Interlock for proximity sensor input 2 GNDD Signal ground 3 2 8V 2 8 volt power supply for proximity sensor 4 No connection N C 5 Cable sen...

Страница 146: ...w Relay contact input for Low level Chem level in container below sensor displays 15 above sensor displays 65 on display 7 Mid Relay contact input for Mid level Chem level in container below sensor di...

Страница 147: ...ng 8 GNDD Signal ground Programming 9 Level Hi Digital output for highest level optical probe 10 5V Supply power 11 5V Supply power 12 Current_CNTL2 Current output drive circuit for IR LED hi level 13...

Страница 148: ...power present inside the Power Supply Module enclosure There are no serviceable parts located inside the Power Supply Module enclosure If the VaporGuard should need repair contact your local Versum M...

Страница 149: ...rform site specific lockout tagout procedures for AC power removal It is a SEMI S2 requirement that the provided lockout device be lockable in the OFF position only The lockout tagout isolation must a...

Страница 150: ...tion WARNING WARNUNG Die Wechselstromversorgung mu den jeweiligen Vorschriften und Normen entsprechen Soweit lokale Vorschriften das Zusammenf hren von wechselstromf hrenden und Neutralleitern in beid...

Страница 151: ...r the safe installation and removal of the quartz bubblers WARNING The incoming gas pressure to the bubbler must not exceed 204 77 kPa absolute pressure 15 psig gauge pressure at any time Downstream f...

Страница 152: ...e adapters to defeat bubbler valve keying Valves are sized to prevent accidental backward installation of the bubbler 3 Inspect bubbler carefully Do not use and contact Versum Materials Inc if bubbler...

Страница 153: ...Beispiel Schutzbrille Gesichtsschutz chemikalienbest ndige Handschuhe und chemikalienbest ndiger lang rmeliger Kittel Ein Zweitbeh lter und Reinigungsmittel sollten bereitstehen falls Chemikalien ver...

Страница 154: ...quids CAUTION VORSICHT Nur das oben empfohlene l in der Schutzh lse f r den Temperaturf hlerverwenden Kein Wasser und keine leicht verdampfbarenL sungsmittel wie Azeton Alkohol usw benutzen Die Verwen...

Страница 155: ...differences between various types of bubblers the User should consider the need for application specific pressure control and over pressure relief WARNING AVERTISSEMENT Pour assurer l op ration sans r...

Страница 156: ...ubbler 2 The Bubbler should be positioned only one way With the system facing forward the thermowell should be directly on top of the magnet in the base of the Source Cup Assembly This is important fo...

Страница 157: ...orrectly the VaporGuard will alarm with a probe not installed alarm Moving the probe down or rotating the bubbler to land the probe on top of the magnet The system will beep to let you know that you a...

Страница 158: ...Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 45 Figure 6 16b Bubbler Positioning in Source Cup Assembly Mode...

Страница 159: ...the safety data sheet SDS for the specific chemical being used and wear appropriate personal protective equipment An SDS is included with every Versum Materials Inc bubbler Cut resistant gloves must...

Страница 160: ...6 6 3 Decommissioning Procedure 1 Don the appropriate PPE according to the chemistry Verify that there are no chemical spills or leaks on or near the VaporGuard If a spill or leak is found refer to s...

Страница 161: ...oad the software The following procedure lists the steps necessary to download the software into the Source Cup assembly and Power Supply Module with a VaporGuard programmer NOTE The software for the...

Страница 162: ...d Proprietary Data Page 49 7 Repeat for the Source Cup Assembly using a programmer that s loaded with the Source Cup software Plug the programmer in to connector J3 Figure 6 18 VaporGuard Programmer P...

Страница 163: ...Temp 0 5V 0 110 C Remote Temp output 20 Violet Wht 10 White Level Output 0 5V 0 100 Remote Level output Analog In 8 Violet 10 White Temp Set Point 0 5V 0 110 C Remote Temp Set point Digital Input 2 Br...

Страница 164: ...a hardware interlock to remotely remove high current energy from the Source Cup Assembly in the event that the system loses exhaust or the detection of 25 LEL of the chemical is detected The interface...

Страница 165: ...VaporGuard Installation and Operation Manual 163315 E 6 39 This Page Intentionally Left Blank...

Страница 166: ...VaporGuard Installation and Operation Manual 163315 E 6 39 Figure 6 19 System Schematics...

Страница 167: ..._____________________________________________________________ MNL000424 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprieta...

Страница 168: ...ure 7 1 Digital Volt Meter accuracy 0 05VDC 0 5mADC 0 05 Remote Display Module 1 2 2 Temperature Calibration of RTD Circuit The temperature control will retain its calibration over long periods The ca...

Страница 169: ...only be verified If the quartz level sense circuit does not work the Source Cup Assembly must be sent back to Versum Materials Inc for repair replacement Figure 7 1 Temperature Calibration PCA P N 146...

Страница 170: ...check mark to get to the TEMP POT CONFIG screen Select the green check mark again to adjust the individual potentiometers shown in figure 7 2 NOTE The Stainless Steel Level Sense Calibration screen i...

Страница 171: ...within the tolerances adjust the gain potentiometer until it does The gain potentiometer is designated on the display by the G Use the left or right arrow to move the cursor to the desired potentiome...

Страница 172: ...etails on Remote Display Module PN 152235 1 2 5 Voltage Output Calibration 1 Remove the DDC connector from the Power Supply Module Install the Remote Display Module to J3 connector of the Power Supply...

Страница 173: ...ead 0 Verify that the output reading is 0 0 VDC 0 05 Adjust the offset parameter OS as required 11 Repeat steps 9 and 10 until the adjustments are no longer required 12 The user may check any percenta...

Страница 174: ...d is still within calibration 1 Remove the DDC connector from the Power Supply Module 2 Connect the DMM positive lead to connector J5 7 and common to J5 10 of the Power Supply Module to check the temp...

Страница 175: ...temperature probe to achieve a 100 C reading Then reconnect and allow measurement to settle on ambient temperature Use these two points to verify the temperature output is within tolerances Table 7 1...

Страница 176: ...play If this does not occur the VaporGuard is not operating correctly Place probe back in bubbler and clear alarms Press the START switch however dependent on the temperature reading the unit may need...

Страница 177: ...0W 149476 Remote Display Module and Interconnect Cable 8 meter 152235 Interconnect Cable 3 meters Standard 160392 Manual Insulation and Operation CD or E File 163315 Temperature Probe Assembly 163547...

Страница 178: ..._________________________________________ MNL000425 doc Revision 0 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Inter...

Страница 179: ...o configurations is the thermal cutoff and maximum temperature setting refer to Table 5 3 Thermal Cutout Switch Configuration Level monitoring by the VaporGuard is only available with the Ultrasonic p...

Страница 180: ...on 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 2 Figure 8 1 VaporGuard with Stainless Steel Source Container Install...

Страница 181: ...00426 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 Figure 8 2 Ultrasonic Level Probe part of S S Conta...

Страница 182: ...PU and in turn will display a liquid level readout on the front panel The output signal to the DDC will change accordingly The displayed readouts corresponding to the chemical level in the S S contain...

Страница 183: ...asonic Level readout in percentage This table shows the logic level of the Ultrasonic Probe Ultrasonic Level Function DC Volt Cable Interlocked USIL 0 0 2 100 5 5 4 85 4 67 65 3 56 15 0 82 5 Low Chem...

Страница 184: ...426 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 Figure 8 3 S S Source Container with Ultrasonic Level...

Страница 185: ...s placed in the cabinet and all electrical connections have been made insure that the S S container is kept in a vertical position CAUTION The weight of the S S container is 17 pounds when full Do not...

Страница 186: ...the probe down or rotating the S S container to land the probe on top of the magnet The system will beep to let you know that you are in the correct location Clear the alarm from the ALARM CLEAR scre...

Страница 187: ...al and may jeopardize the integrity of the chemical CAUTION VORSICHT Die Verschrau bungen der Einla und Ausgangsventile auf dem Deckel des S S Chemikalienbeh lters nicht drehen oder l sen da dadurch d...

Страница 188: ...d leave valve closed Do not change the valve configuration 11 Perform system leak check to the S S container per customer or S S container specifications 12 To remove the S S container close valves an...

Страница 189: ...do so the site must use an Industrial Hygiene Health Hazard Assessment reviewed and approved by sites EH S department This table was derived from Versum Materials Inc required Liquid Chemicals Person...

Страница 190: ...opening primary containment and significant risk of exposure to chemical Buddy System Two people wearing the same level of PPE and trained in basic chemical gas safe handling techniques Person One Com...

Страница 191: ...___________________________________________________________________________________ MNL000427 doc Revision 00 08 26 2016 Versum Materials Inc as of the revision and date shown All rights reserved Conf...

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