_______________________________________________________________________________________________________________
MNL000417.doc
Revision 3
04/16/201904/16/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
-
5
TABLE OF CONTENTS
Introduction
I.1
Introduction to the Manual
I-1
I.2
Emergency Response – 24 Hour Service
I-2
I.3
Definition of Terms
I-2
I.3.1
Definitions
I-2
I.3.2
Abbreviations
I-4
I.4
Approved Chemicals
I-5
Chapter 1
Delivery, Unpacking, and Inspection
1-1
1.1
Delivery
1-1
1.2
Unpacking
1-1
1.3
Inspection
1-1
Chapter 2
System Components and Specifications
2.1
Equipment and Features
2-2
2.1.1
Physical Description
2-2
2.1.2
Features
2-4
2.2
Physical Description
2-7
2.2.1
VaporGuard® Physical Specifications
2-7
2.2.2
Source Cup Assembly
2-9
2.2.3
Power Supply Module
2-10
Chapter 3
3.1
VaporGuard® Absolute Control System For Use With Trans-LC™
VaporGuard® Manufactured for Use of Trans-LC
™
3-1
3.2
Trans-LC™
3-2
Chapter 4
System Safety
4.1
Hazardous Location Safe Operation Requirements
4-1
4.2
Safety Labels
4-3
4.3
Alarm Interlocks
4-12
