MNL000426.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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8.3
Versum Materials, Inc. S.S. Container with Ultrasonic Level Probe
The VaporGuard® is configured for use with an Versum Materials, Inc. S.S container
with built in Ultrasonic Level probe; refer to figure 8-3.
The UltraSonic Level probe is attached to J-5 on the top of the VaporGuard®
Source Cup Assembly. When the chemical level drops below one of 4 sensors within
the UltraSonic Level probe, the sensor will activate a relay output and will go open or
closed depending on either a wet or dry condition.
These changes are monitored by the Source Cup Assembly CPU and in turn will
display a liquid level readout on the front panel. The output signal to the DDC will
change accordingly. The displayed readouts corresponding to the chemical level in
the S.S container are as follows:
Table 8‐1
Ultrasonic Level status
Empty Sensor
Relay contact input for Empty level
*Chemical level in container below sensor displays 5%, above
sensor displays 15% on display.
Low Sensor
Relay contact input for Low level
Chemical level in container below sensor displays 15%, above
sensor displays 65% on display,
Mid Sensor
Relay contact input for Mid level
Chemical level in container below sensor displays 65%, above
sensor displays 85% on display,
Full Sensor
Relay contact input for Full level
Chemical level in container below sensor displays 85%, above
sensor displays 100% on display,
NOTE:
*At 5% Low Chem alarm is displayed on the front panel and the Low Chem
output signal is activated to the DDC.
