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MNL000426.doc
Revision 0 0
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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10
NOTE:
The connection of the lines to the S.S. container and the gas cabinet is
beyond the scope of this manual.
10.
Once the gas cabinet plumbing has been established, install new gaskets onto
the inlet and outlet connector of the valves. Tighten to specification.
NOTE:
If carrier gas is not used, disregard installation of the input valve and leave
valve closed. Do not change the valve configuration.
11.
Perform system leak check to the S.S. container per customer or S.S. container
specifications.
12.
To remove the S.S. container, close valves and perform steps 4 thru 9 in reverse
order.
NOTE:
Never open manual valves on the S.S. container, prior to verifying plumbing
connections are in place.
To prevent downstream condensation, insure that downstream lines external to
the S.S. container are at a higher temperature than the temperature set point
on the VaporGuard®.
It is the customer’s responsibility to install appropriate pressure relief devices to
prevent overpressure conditions and to connect the carrier gas accordingly.
Furthermore, it is dependent upon the customer’s procedures whether safety
shoes are required while handling S.S. containers.
