Chapter -
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MNL000422.doc
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09/06/2017
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4.6
Decontamination Procedure
1.
Don the appropriate PPE according to the chemistry. Turn OFF Power Supply
Module, SW1. Insure that the incoming gas to the source container is off.
(reference section 6.6.2 for quartz bubbler removal)
2.
Visually inspect Source Cup Assembly for the location of any chemical spill.
Determine if chemical is on cable connectors, Source Cup housing, or contained
within the Cup. Verify if the container is damaged (i.e. cracked, corroded). Do not
reuse a damaged container.
3.
If chemical is found on any cabling, reference the chemicals manufacturers SDS for
the spill cleanup and disposal procedure (reference section 4.6). Remove the
contaminated cables and dispose of them by the customers’ site discretion. Obtain
new cables, reference parts list in section 7.5.
4.
Disconnect the gas lines from each valve, and then carefully remove the container
from the Source Cup Assembly. If chemical is found on the container or has
entered the thermowell, reference the chemicals manufacturers SDS for the spill
cleanup procedure. If the container is not damaged, it can be reused. However, if
it‘s damaged and was purchased from Versum Materials, Inc., return the container
to Versum Materials, Inc. by utilizing the proper shipping packaging.
Call Versum
Materials, Inc. at 610-481-4911 for support.
5.
Visually inspect inside and around the Source Cup for chemical. If chemical is
found, refer to the chemical manufacturers SDS for the spill cleanup procedure.
6.
Dependent on the chemistry, if any damage (i.e. corrosion, deformity) is found, the
Source Cup Assembly cannot be reused. Dispose per company protocol and
replace with new Source Cup Assembly.
7.
If no damaged is found, the Source Cup Assembly can be placed back in service.
However, it is recommended to perform an operational check (ref. section 5.5) on
the system.
