MNL000426.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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3.
Prior to installing the S.S. container into the Source Cup, fill the thermowell with
1/2 in. (8 to10 drops) of Versum Materials, Inc. Thermowell Oil,
P/N 1600-0001
.
NOTE:
Failure to use the proper oil may result in unstable temperature control and
possible false alarm conditions.
4.
Hold the S.S. container carefully by the valves and lower into the Source Cup.
The S.S. container can be positioned as desired for valve hook-up.
5.
Place the Temperature Probe in the thermowell and make sure that the probe is
seated at the bottom of the thermowell.
6.
The Temperature Probe’s proximity sensor will be within 1/2 inch (1.27 cm) or
less from bottom of the Source Cup Assembly for proper operation. If this is not
achieved correctly, the VaporGuard® will alarm with a “Probe Not installed”
alarm. Moving the probe down or rotating the S.S. container to land the probe on
top of the magnet. The system will beep to let you know that you are in the
correct location. Clear the alarm from the ALARM CLEAR screen. See chapter
5.
7.
Using the keypad interface, adjust the temperature setpoint. Press the up
(START) position on the front switch. The green LED will illuminate to indicate
that control power is being applied and the system will not begin controlling the
S.S. container temperature. Allow the temperature to stabilize. The time required
for temperature stabilization will vary depending on the temperature range of the
system, the original temperature of the S.S. container and the ambient
temperature.
NOTE:
If the Temperature Probe is left out of the S.S. container or not installed
correctly, the green LED will not turn on and the bottom half of the switch
(red LED) will be flashing. In addition, the alarm still active will display on the
second row of the LCD interface.
8.
Place the lid insulator properly on the S.S. container (if applicable).
9.
Remove the cap or plug on the inlet and outlet valve VCR connectors. Use the
proper wrench to remove.