MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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39
Refer to Versum Materials, Inc. Safetygram 50 ‐ Trans‐
LC™
1.
The entire system can be kept intact and the Bubbler installed into the Source
Cup Assembly.
2.
Do not use adapters to defeat bubbler valve keying. Valves are sized to prevent
accidental backward installation of the bubbler.
3.
Inspect bubbler carefully. Do not use and contact Versum Materials, Inc. if
bubbler is damaged or appears to be leaking.
NOTE:
The VaporGuard® should be installed (all electrical connections made and
securely bolted to a level shelf) and the main power switch (SW1) on the
Power Supply Module turned off prior to installing a bubbler. Care must be
taken that the Bubbler is kept in a vertical position.
