_______________________________________________________________________________________________________________
MNL000417.doc
Revision 3
04/16/201904/16/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
-
8
5.9
Chapter 6
Thermal Cutout Configuration
System Installation
5-35
6.1
Introduction
6-1
6.2
Placement of the System
6-1
6.3
Installation
6-12
6.3.1
Electrical Requirements
6-12
6.3.2
Grounding Requirements
6-12
6.3.3
Environmental Requirements
6-12
6.3.4
Lighting Requirements
6-12
6.3.5
EMI/RFI Protection
6-13
6.3.6
Thermowell Oil
6-13
6.3.7
VaporGuard® Fan Clearance
6-13
6.3.8
Cables
6-14
6.3.9
Cable Installation Procedure
6-14
6.4
Tool Interface Connection
6-15
6.4.1
Installing the DDC - J5
6-19
6.4.2
Description of VaporGuard® Alarms
6-20
6.4.3
Digital Inputs
6-22
6.4.4
Relay Manual Control
6-22
6.5
AC Power Connections
6-27
6.5.1
De-Energizing Procedure
6-28
6.6
Bubbler Installation
6-29
6.6.1
Installing Bubbler into Source Cup Assembly
6-31
6.6.2
Removing Bubbler from Source Cup Assembly
6-34
6.6.3
Decommissioning Procedure
6-35
6.7
VaporGuard® Programming
6-35
Chapter 7
Calibration
7.1
Introduction
7-1
7.2
Calibration
7-1
7.2.1
Equipment Required for Calibration of VaporGuard® Circuit
7-1
7.2.2
Temperature Calibration of RTD Circuit
7-1
