MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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5.2.8
Sidewall Heater
The 198 Watt heater is wrapped around the Source Cup Assembly and is controlled by
the Power Supply Modules microprocessor.
5.2.9
Thermal Electric Cooler
The thermal electric coolers (Peltier) are used to maintain the temperature of the
chemical to the desired set point. They are controlled by the Power Supply Modules
microprocessor.
5.2.10
Fan Failure Detection
The fan produces a square wave output that is monitored by the microprocessor. If the
frequency of the square wave reduces by more than 40%, an alarm will occur.
5.3
Power Supply Module, Detailed Description
The integrated built-in switching power supply sub-assembly requires a single
connection to a TYPE IEC plug specified for 100-240VAC @ 50-60Hz. The power
supply sub-assembly was designed into a separate enclosure to allow the high-powered
electronics to be remotely located outside of the hazardous area for Class 1 Division 2
applications. The hard wired interlocks in the Source Cup Assembly, if tripped, will turn
off the heater/cooler power in the remote Power Supply Module located in the non-
hazardous area.
The Power Supply Module communicates to the Source Cup Assembly via an RS485
link. Communication is monitored between the two units on both ends. If
communication fails to or from either side, the power will be disconnected from the
Source Cup Assembly and an alarm will be generated.
