Veeco Dektak 150, Руководство пользователя

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Basic User Interface and Stage Positioning Techniques 3-3
SOFTWARE INTERFACE AND STAGE CONTROLS
The Dektak 150 uses the following software interface and stage control devices.
Stage Control
The Dektak 150 has an optional automated X-Y stage that allows both automatic and semi-automatic
sample positioning. Automatic or programmable positioning is described in detail in
Chapter 5 .
Semi-automatic sample positioning is accomplished by using the mouse interactively with the
various screens of the Microsoft
®
Windows
®
interface.
Manual X-Y Stage
After loading the sample on the stage, you coarse-position the measurement site to the center of the
crosshairs using the quick-release clips. You then fine-position the scan site to the center of the
crosshairs using the fine-positioning knobs. For fine-tuning the scan site, you may have to re-null the
tower to adjust for skew (see
Figure 2-1 ).
X-Y Auto Stage and Y Auto Stage
After loading the sample on the stage, you position the sample under the stylus using the icons in the
Stage Control Panel . (Hold down the C
TRL
key for faster movement.) To fine-position the sample to
the reticule, you can enter relative moves in the Stage Control Panel ( Figure 3-6 ) or left-click in the
Sample-Positioning window. The stage follows the movement of the mouse.
A template in the shape or a wafer or disk appears in the Stage Control Panel . Point the mouse to the
desired location on the template, double-click the location, and the stage automatically translates to
that approximate position.
Microsoft Windows XP
The Dektak 150 uses Microsoft Windows XP
®
as the operating environment, allowing integration of
different tasks to increase efficiency and ease-of-use.
Dektak 150 operational tasks are organized into windows, pop-up dialog boxes and pull-down
menus. Virtually all Windows commands have equivalent keyboard shortcuts to provide full
Windows control, keyboard control, or a combination of both Windows and keyboard operation. The
Dektak 150 user interface is described in detail in
Chapter 8, Menu and Toolbar Descriptions .
When working under Windows XP, you can take advantage of the following features:
•
Running multiple applications: You can run several applications under Windows at one time
and easily switch between them, thus creating an integrated work environment.
•
Data exchange between applications: You can transfer data between Dektak 150 and other
standard Windows applications, files, directories, and disks. You can also control all Windows-
related tasks such as directory or file management.