Veeco Dektak 150, Руководство пользователя

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7-16 Scan Routine Parameters
Software Leveling
You can program the Dektak application to software level the profile trace automatically, in relation
to the cursor/trace intercepts, at the conclusion of a scan. In order to obtain accurate step height
readings and analytical calculations, you must software-level the trace. You can also enter cursor
band widths to perform delta average leveling.
IMPORTANT!
Veeco recommends that you hardware-level the sample to less than 10%
of the measurement range. Software-level the trace only by amounts that are less than 10%
of the vertical range.
1 In the Display Parameters section of the Scan Routines window, click Software Leveling (see
Figure 7-1
) to open the Leveling tab (see
Figure 7-17
) .
2 Select the Automatic Leveling check box, and then click Apply .
3 Click the Cursors tab (see
Figure 7-18
), and make your settings according to these guidelines:
•
When the default band width is 0 , the trace levels using only two points at the
R and M Cursor locations.
•
If you know the desired cursor widths, you can enter them into the scan routine. The Width field in the R
Cursor section sets the width of the reference cursor (R), while the Width field in the M Cursor section
sets the width of the measurement cursor (M).
4 Click OK to enter automatic leveling and the leveling cursor widths into the scan routine.
Figure 7-17: Display Parameters Dialog Box: Software Leveling