Veeco Dektak 150, Руководство пользователя

Страница: 177 / 349

7-8 Scan Routine Parameters
Table 7-3: Data Points Per Scan
The horizontal resolution of the Dektak 150 directly relates to the scan length and number of data
points per scan. The scan length is selectable from 50 µm to 55 mm. Without altering the number of
data points per scan, it is possible to adjust the horizontal resolution or the distance between data
points by altering the scan length. The scan resolution parameter displays the distance between data
points (in µm per sample).
When using a low stylus force, the stylus may bounce off the surface if it encounters a large step at
high scan speeds. In applications requiring light stylus force, use low or medium scan speed (in other
words, a longer scan duration) at the shortest possible scan length.
To set the scan resolution:
1 Click any parameter in the Scan Parameters section of the Scan Routines window (see
Figure 7-8
) to
display the Nominal Parameters tab of the Scan Parameters dialog box.
2 In the Resolution field, enter the desired scan duration (in seconds) using the keyboard (see
Figure 7-8
).
The resolution automatically adjusts in accordance with your new duration value.
3 Click OK to close the dialog box and enter the resolution into the scan program.
Figure 7-8: Scan Parameters Dialog Box: Resolution
Duration Data Points Resolution at Maximum
Scan Length
200 seconds 60,000 0.033
µ
m/sample
100 seconds 30,000 0.067
µ
m/sample
50 seconds 15,000 0.133
µ
m/sample
13 seconds 3,900 0.513
µ
m/sample
3 seconds 900 2.222
µ
m/sample