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Miscellaneous Procedures and Instructions
Diffusion Pump Spares
Part Number Description
03-930053-01
Chassis Fan, Electronics Side
03-930645-01
Chassis Fan, Pump Side
03-920510-00 Plastic
Nut
03-930109-02 O-ring,
Elbow
27-402294-00
O-ring, Diffusion Pump Inlet
27-402536-00
O-ring, Diffusion Pump Exhaust
03-930109-16
O-ring, Peltier Baffle
03-930288-01
PWA Diffusion Pump Controller
27-229907-00 Thermocouple
Gauge
03-930640-91
Diffusion Pump AX65 (90V 250W) Includes 40 cc Fluid
03-930640-92
Diffusion Pump AX65 (165V 250W) Includes 40 cc Fluid
03-930640-94
Diffusion Pump Heater (90V 250W) Includes 40 cc Fluid
03-930640-95
Diffusion Pump Heater (165V 250W) Includes 40 cc
Fluid
03-930639-01
Diffusion Pump Fluid - 40cc - Santovac 5
03-930038-01
Peltier Baffle Assembly
03-930048-91
Assembly, Vacuum Manifold DP (120V)
03-930048-92
Assembly, Vacuum Manifold DP (230V)