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Mass Spectrometer Maintenance
A
Inlet Clamp
D
Exhaust Clamp
B Manifold
E Elbow
C Exhaust
F Diffusion
Pump
Relative positions of the manifold, diffusion pump, elbow and clamps as viewed from
above.
NOTE: The manifold and elbow are shown as outlines for clarity.
Turning on the Mass Spectrometer
1. Make sure the power switch on the rear panel is in its OFF position.
2. Check that all the heater cables are plugged in.
3. Check that all the Saturn covers are in place, especially the left side cover and
the Peltier baffle ducting.
4. Plug in the Saturn power cable.
5. Turn the power switch on the rear panel to its ON position.
6. Bring up the System Control page.
7. Monitor the foreline pressure on the shutdown page until the diffusion pump is
ready.
NOTE: The pressure should read below 500 mTorr within the first five minutes,
and
≤
100 mTorr within 45 minutes. Higher values may indicate a leak. Refer to
the
Troubleshooting
section
.
