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Troubleshooting of Diffusion Pump System
Troubleshooting of Diffusion Pump
System
Overview
This section describes symptoms that the user may observe during startup and
routine operation.
Problems During Startup
The user should check for faults during Startup by monitoring the foreline
pressure on the shutdown page.
Shutdown Page
1. Foreline pressure exceeds 5000 mTorr (Large Air Leak)
a. Check the GC column is not broken.
b. Check the foreline hose between the diffusion pump and foreline pump
for cracks or collapsed sections.
c. Check all the vacuum seals: diffusion pump, elbow, foreline pump, etc.
d. Check for large air leaks. Refer to troubleshooting sections on leaks.
e. Check the level and condition of the foreline pump oil.
f. Contact Varian Customer Support Representative.
2. Foreline pressure exceeds 500 mTorr (Moderate Air Leak)
a. Check the GC column is not broken.
b. Check the CI valve is OFF using the Instrument Control Page.
