4. Operation
TSα Series User Manual 71
[03 Main_L, 04 Main_U] type Motion
③ 03 Main_L
Main Arm Only (L type)
Item
Mode
ArmSet
MainArm
Method
Chuck
OutWait
NoUse
Motion
LType
MArmDn
Nozzle
SArmDn
-
EOATRot
BeforeT
MArmOff
Off
SArmOff
-
EjtCtl
Use
Alarm
Use
④ 04 Main_U
Main Arm Only(U type)
Item
Mode
ArmSet
MainArm
Method
Chuck
OutWait
NoUse
Motion
UType
MArmDn
Clamp
SArmDn
-
EOATRot
BeforeT
MArmOff
Off
SArmOff
-
EjtCtl
Use
Alarm
Use
Method
Chuck ◀
MArmDn
Nozzle
EOATRot
BeforeT
Summary of Contents for TS-200DI
Page 2: ......
Page 14: ...xii...
Page 15: ...xiii...
Page 19: ......
Page 20: ......
Page 21: ...1 Introduction...
Page 22: ......
Page 28: ......
Page 29: ...2 Before Operation...
Page 30: ......
Page 41: ...3 START UP STOP...
Page 42: ......
Page 47: ...4 OPERATION...
Page 48: ......
Page 114: ......
Page 115: ...5 Follow Up...
Page 116: ......
Page 126: ......
Page 127: ...6 Error...
Page 128: ......
Page 134: ......
Page 135: ...Appendix...
Page 136: ......
Page 143: ......