4. Operation
72 TSα Series User Manual
[05 MS_L, 06 MS_U] type Motion
⑤ 05 MS_L
Main and Sub Arm (L type)
Item
Mode
ArmSet
M&S
Method
Vacuum
OutWait
NoUse
Motion
LType
MArmDn
Nozzle
SArmDn
Clamp
EOATRot
BeforeT
MArmOff
Off
SArmOff
TrvOff
EjtCtl
Use
Alarm
Use
⑥ 06 MS_U
Main and Sub Arm (U type)
Item
Mode
ArmSet
M&S
Method
Vacuum
OutWait
NoUse
Motion
UType
MArmDn
Clamp
SArmDn
Nozzle
EOATRot
BeforeT
MArmOff
Off
SArmOff
TrvOff
EjtCtl
Use
Alarm
Use
ArmSet
Vacuum ▶
MArmDn
Clamp
SArmDn
Nozzle
EOATRot
BeforeT
Summary of Contents for TS-200DI
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Page 14: ...xii...
Page 15: ...xiii...
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Page 21: ...1 Introduction...
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Page 28: ......
Page 29: ...2 Before Operation...
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Page 41: ...3 START UP STOP...
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Page 47: ...4 OPERATION...
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Page 115: ...5 Follow Up...
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Page 127: ...6 Error...
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Page 135: ...Appendix...
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