FEI Quanta FEG 250, User'S Operation Manual

Page: 183 / 228

System Options: Heating Stage 1000 °C / Heating Stage 1500 °C
9-35
Heating Stage 1000 °C / Heating Stage 1500 °C
The Heating stage (HS) is used to control the sample temperature up
to 1000 °C, resp. 1500 °C and to observe sample with the use of FEI
electron microscope.
WA R N I N G !
Opening the microscope chamber does not switch off the
heating. When operating the Heating stage, please be aware that
neighbouring surfaces can become hot.
HEATING STAGES PARTS
• The Heating stage assembly
• The Chamber feed-through plate
• The Water chiller, The Flow box and water hoses
• The Heating stage controller and cables
• The High temperature GSED
• The HS 1500 Heat shield assembly
• The HS 1500 Heat shield and Sample bias (SSB)
FIGURE 9-28 HEATING STAGE SYSTEM BLOCK DIAGRAM
Heating Stages Assembly
is mounted onto the microscope stage using the dovetail stage
adapter. The HS 1000 and the HS 1500 have the same construction
and look similar. Each stage is appropriately labeled (engraved) on
the top surface.
Caution!
The presence of water hoses and cables inside the chamber causes a
risk of heating stage and further the vacuum system damage (the hoses
could be pulled out of the stage and water could spill into the vacuum
port in the chamber bottom). Once the heating stage assembly is
installed, it should be moved only about ±10 mm from the home position
in X / Y axes. Rotation and Tilting are locked automatically. Tilt can be
released by the user in the
Stage module / Coordinates tab / Tilt
check box (see Chapter 7). Be aware of the limitation!