FEI Quanta FEG 250, User'S Operation Manual

Page: 120 / 228

Stages: Stages Types and Accessories
7-6
STAGE MOVEMENT LIMITS
The motorised movements of the stage can be operated under
software control for more advanced location mapping. This includes
Shift , Get , Track and the Stage module functionality. A live image can
be repositioned either by the stage movement (manual or software) or
by the
Beam Shift . The tilting mechanism can be locked for more
stability at high magnifications using the software Clamp feature.
Note:
When moving the stage or tilting the specimen, the magnification may
need to be reduced not to lose the feature of interest off the screen.
C a u t i o n !
The positive Z value direction depends on the Link Z to FWD status
(see below).
FIGURE 7-6 STAGE MOVEMENT SCHEMA
TABLE 7-2 STAGE FEATURES AND LIMITS
Item 50 mm 100 mm 150 mm Note
X -25 to +25 mm -50 to +50 mm -75 to +75 mm
Y -25 to +25 mm -50 to +50 mm -75 to +75 mm
Z 25 + 25 mm 0 + 60 mm 0 + 60 mm in external
R 360° 360° 360° continuous
T -15° to +75° -5° to +70° -5° to +70°
Eucentric Position WD = 10 mm 11.6 mm
*)
29.2 mm
*) *)
distance between a sample
top surface and the stage base
Clamp No Yes Yes
Maximum sample
weight 250 g 2 000 g 5 000 g for all tilt angles