FEI Quanta FEG 250, User'S Operation Manual

Page: 172 / 228

System Options: Cooling Stage / Waterless Cooling Stage
9-24
FIGURE 9-22 OUTER AND INNER CABLES
Water Chiller, Flow Box and Cooling Water Hoses
Note:
In case the waterless Cooling stage is installed the following devices
are not available.
An external water chiller is provided to efficiently remove excess heat
from the temperature stage.
FIGURE 9-23 THE WATER FLOW BOX CONTROL BOARD
The water flow box is installed between the water chiller and the
chamber feed-through plate. It monitors a water flow via a sensor on
each line and closes both solenoid valves if a failure is detected to
protect the system against a water leak into the chamber.
Cooling water hoses are delivered: the shortest set of hoses is
connected to the stage on one end, the other end goes to the inside of
the feed-through plate. One set of hoses goes from the outside of the
chamber feed-through plate to the water flow box. Next one connects
the water chiller with the water flow box.
COOLING STAGE INSTALLATION
The chamber feed-through plate should be in place and remain
installed.
1. Vent the specimen chamber and open the door.
2. Remove any sample holder from the stage rotation head.