FEI Quanta FEG 250, User'S Operation Manual, Page: 50 / 228

Software Control: xT microscope Control Software
4-22
PAGES AND MODULES
The software controls on the right side of the screen are organized
into
Pages , which are divided into Modules holding specific functions.
The required page can be selected by pressing the corresponding
icon button or with the use of short-cuts (see below).
Note:
The number in front of the module name represents an order in which
the modules are introduced in the following text.
For Software Interface Elements control see above.
1. The Vacuum module
is used to control the pressure and the gas type in the specimen
chamber. The
Pump button starts the pumpdown procedure for the
specimen chamber and the column. The system allows the
accelerating voltage to be switched on only when the column is
sufficiently evacuated. The
Vent button starts venting for a sample or
detector exchange after the user confirmation (see Chapter 3 and 5).
The Mode radio buttons bring the system to:
• the High Vacuum mode, which is the conventional operating
mode (associated with all scanning electron microscopes), used
for observing conductive specimens that can withstand low
pressure conditions and do not outgas.
In this mode the system pumps continuously to achieve the lowest
possible pressure.
• the Low Vacuum for observing non-coated and non-conductive or
partially conductive specimens.
• the ESEM Mode for observing natural status of samples.
In these modes, the chamber pressure is controlled using the
Chamber Pressure preset / continuous adjuster, while the column
is at a much lower pressure.
Note:
The gas environment can be selected from the list box for the Low
Vacuum and ESEM modes.
The system automatically switches to one of the modes when the
chamber is Vented and a dedicated detector is installed. If no
dedicated detector is installed, user is asked to determine a detector
mounted.
TABLE 4-1 PAGES AND MODULES LIST
Pages Modules (Tabs)
Beam Control 1. Vacuum, 2. Column, 3. Magnification,
4. Beam, 5. Tuning, 6. Detectors, 7. Status
Navigation 8. Stage (Map / Coordinates / Tilt / Navigation),
9. Rotation, 10. Detector Settings, 6. Detectors,
7. Status
Processing 11. Measurement / Annotation, 12. Digital Zoom,
13. Enhanced Image (LUT / Mix 3 / Mix 4 / Color /
Process), 6. Detectors, 7. Status
Alignments 14. Alignments (Instructions / Individual steps),
7. Status