FEI Quanta FEG 250, User'S Operation Manual

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PREFACE
User Manuals
THE USER SAFETY MANUAL
provides important information required during an operation and a
maintenance for a product and personal safety. Be sure to read this
document (which is delivered as the PDF file and in the printed form
also) at least.
THE USER OPERATION MANUAL
for your Scanning Electron Microscope is divided into the following
chapters:
1. PREFACE
provides information about the manual structure.
2. SYSTEM OVERVIEW
gives the basics about your system capabilities.
3. SYSTEM OPERATION
gives the basics about the vacuum system and procedures for
several system on/off modes, including Log On/Off, Standby Mode,
Overnight Mode, Complete Shutdown, and Emergency Shutdown.
4. SOFTWARE CONTROL
describes the interface that controls system operation, giving the
function of each tool, menu item and control page.
5. OPERATING PROCEDURES
gives procedures for how to use the system.
6. ALIGNMENTS
explains how to align the column and stage to achieve optimal
performance.
7. STAGES
gives a full description of the stage functionality and its software
control.
8. MAINTENANCE
gives step by step cleaning and maintenance procedures.
9. SYSTEM OPTIONS
explains relevant options that are integrated into or accessory
to the system.