FEI Quanta FEG 250, User'S Operation Manual

Page: 228 / 228

System Options: Quick Loader
9-80
Unloading a sample
1. If there is a sample carrier in the loader chamber attached to the
bayonet, remove it (the chamber needs to be vented and the
carrier removed).
2. Switch OFF the electron and ion beam accelerating voltage.
Retract the GIS, Omniprobe or STEM modules (if present) to a
safe state (can not be used in combination with loader).
3. Close the loader chamber lid. After the lid is properly closed the P
button starts to shine.
4. Press the P button, the button stop to shine and the pumping cycle
starts, the stage moves to the loading position at the same time.
When the vacuum in the loader chamber is correct the pump light
starts to shine and the
OK button lights up indicating operation can
continue. The gate valve lever interlock is released.
5. Turn the Gate Valve knob lever from LOCK to UNLOCK position.
Then carefully pull the knob bar fully out from the first mark on the
knob drum to the second mark. Turn the knob bar to
(anticlockwise) to the LOCK position.
6. Move the unloading rod from the Parking position into the chamber
while still holding the rod bar. When resistance is found turn the
rod bar to the left (anticlockwise) to enter the bayonet. Push
forward and turn the rod to the right (clockwise) and the bayonet
will engage with the Sample Carrier on the Stage Adapter close to
the end of the rod travel.
7. Withdraw the rod back to the far end of the rod guide and place in
the Parking position. The rod, bayonet and sample carrier are now
out of the chamber and sit in the Loader chamber.
8. Close the Gate Valve by turning the knob bar to the UNLOCK
position and press the knob in to engage the valve over the
opening. This can be seen through the lead glass lid, then turn the
knob bar to the LOCK position to secure the valve.
9. Press V button once. The chamber will be vented and the lid can
be opened. The sample carrier can be released by turning the rod
bar to the far left and pulled back then returned to the parking
position. Remove the sample carrier.
10. Close the loader chamber lid.
11. Press P button to evacuate the loader chamber.
Note:
In case the sample carrier falls from the loading rod, vent the chamber
with gate valve opened, put the carrier back to a correct position and
close the gate valve. Proceed from the step No. 1.
Loading/Unloading - vented microscope chamber
If the microscope chamber is vented and Loader chamber is
evacuated, press
V to vent the loader chamber. After the chamber is
vented, you can:
• press P button to pump the chamber again if needed (store sample
under vacuum condition)
• press V button to release the mechanical interlock of the gate
valve lever. Then you can open gate valve.
Close the gate valve before microscope chamber pumping.