FEI Quanta FEG 250, User'S Operation Manual

Page: 53 / 228

Software Control: xT microscope Control Software
4-25
7. The Status Module
can be found at the base of all pages, displaying following information
(some of them as a tool tip):
• The Chamber Pressure: shows the specimen chamber pressure.
• The Gun Pressure: shows the electron source space pressure.
• The IGP Upper / IGP Lower shows the electron source space
pressure in detail.
• The Column: shows the column pressure.
• The Emission Current: shows the electron current emitted from
the source.
• The Coulomb Tube Current shows the electron current flowing
above the final lens aperture.
The system conditions are displayed by means of the icons:
TABLE 4-2 STATUS ICON MEANING
Icon Status
Column and Chamber Vented
(Complete Shutdown - see Chapter 3)
Column and chamber Pumping or Venting
Column and Chamber Vacuum
(ready for the microscope operation)
Column Vacuum and Chamber Pumping or Venting
Column Vacuum and Chamber Vented
(ready for a sample and/or detector exchange)
Stage axes – Lock (any one) / Unlock (all)
Displays when Dynamic Focus is On
Displays when Scan Rotation is not zero
Displays when External scanning mode is On