FEI Quanta FEG 250, User'S Operation Manual

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Stages: Stage Related Functions
7-17
6. Check the Details if needed or Finish the procedure.
Using 1-, 2- or 3- Point Alignments
Sample Navigation / Navigation Montage...
This software feature enables to navigate along the sample surface
when the field of view is smaller than desired (limited by an aperture
for instance). For this purpose it is possible to use up to 3 images
which could be changed dynamically (capture, save or load anytime).
Set the Target HFW (Horizontal Field Width) range, which influences
informations fields: the tiles number – Map Size , the Estimated Time
for the procedure and the HFW of each tile – Single Image HFW .
When the Use actual HFW check box is ticked, the system does not
use automatically the HFW according to the hardware configuration
and sets the user one. This is convenient when the image corners are
rounded and imaging does not cover an entire area.
The Stage menu / Sample Navigation mode is then automatically
set. For the selected quad the upper right corner green icon indicates
the functionality.
A green rectangle showing the actually selected field of view (in the
selected quad) appears with the size corresponding to the
magnification. In quad(s) using Sample Navigation the Selected Area
Zooming and the Get features could be used.
Notes:
The basic condition for a correct functionality is an equal stage
rotation value for both captured and corresponding live images. In
other case the upper right corner red icon indicates no functionality in
the respective quad.
TABLE 7-4 ALIGNMENT TYPE DIFFERENCES
Use 1-Point Alignment 2-Point Alignment 3-Point Alignment
Major Use Aligning to new point
directly offset from
the existing location Aligning the stage axes with
the specimen X-Y orientation
to correct for any distortion Transforming to nonstandard
units on dies or RAM arrays;
correcting for any distortion
Change in Scale None Scales the axes together X can be scaled differently from Y
Change in
Orientation None Rotates both axes with a
fixed 90° angle between axes X and Y orientation can be
different