
System Options:
Cooling Stage / Waterless Cooling Stage
9-21
Cooling Stage / Waterless Cooling Stage
The Cooling stage (CS) is used to control the sample temperature
± 20 °C around the ambient, uppermost from - 25 °C to +55 °C and to
observe it with the use of FEI electron microscope. In conjunction with
a specimen chamber water vapour pressure it can be used to create a
water condensation on the sample surface to keep it wet.
WA R N I N G !
Opening the microscope chamber does not switch off the cooling.
When operating the Cooling stage, please be aware that
neighbouring surfaces can become cold.
COOLING STAGE PARTS
•
The Cooling stage assembly
•
The Chamber feed-through plate
•
The Cooling stage controller and cables
•
The Water chiller, The Flow box and Cooling water hoses
FIGURE 9-18
COOLING STAGE SYSTEM BLOCK DIAGRAM
The Cooling Stage Assembly
is mounted onto the microscope stage using the mounting adapter.
Caution!
The presence of water hoses and cables inside the chamber causes a
risk of cooling stage and further the vacuum system damage (the
hoses could be pulled out of the stage and water could spill into the
vacuum port in the chamber bottom). Once the cooling stage
assembly is installed, it should be moved only about ±10 mm from the
home position in X / Y axes. Rotation and Tilting are locked
automatically. Tilt can be released by the user in the
Stage
module /
Coordinates
tab /
Tilt
check box (see Chapter 7). Be aware of the
limitation!
Summary of Contents for Quanta FEG 250
Page 8: ...C vi...
Page 28: ...System Operation Quanta FEG System States 3 10...
Page 108: ...Alignments 1 Gun Alignment 6 6...
Page 114: ...Alignments 154 Water Bottle Venting 6 12 154 Water Bottle Venting...
Page 152: ...System Options Automatic Aperture System 9 4...
Page 154: ...System Options Nav Cam 9 6 401 NAV CAM AUTOBRIGHTNESS...
Page 177: ...System Options Cooling Stage Waterless Cooling Stage 9 29...