FEI Quanta FEG 250, User'S Operation Manual

Page: 216 / 228

System Options: Beam Deceleration
9-68
STAGE MODIFICATION
When extending the system capabilities with the Beam Deceleration
mode, it is necesary to make the stage modification by mounting the
BD attachment on the stage head. For systems acquired with the
Beam Deceleration this procedure is not carried out.
1. Open the specimen chamber and remove the specimen holder.
2. Place holding screw to the free stage position (use M3 or M4
thread according to which is avalilable).
3. Place the BD attachment on the stage (holding screw is under the
cable output part to keep it stable while rotating the stage) and tight
the central screw to fix the attachment (use the socket-head
screw).
4. Set maximum X,Y and Tilt coordinates to ensure the cable does
not limit stage movement. Put the cable into the holder, be sure the
cable is not placed in CCD camera field of view!
5. Plug the connector from the BD attachment to the chamber
feedthrough and slightly rotate it to lock.
6. Place the specimen holder back.
Be aware (before closing the chamber door) the specimen height
increases after mounting the BD attachment!
The BD attachment could be left in the chamber or removed, when
larger specimens should be observed.