FEI Quanta FEG 250, User'S Operation Manual

Page: 75 / 228

Operating Procedures: Specimen Preparation and Handling
5-3
MOUNTING THE SPECIMEN TO THE HOLDER
Wafers and PGA devices have individual sample-mounting
procedures. If you are using a wafer piece or other sample, attach the
specimen to the specimen holder using any suitable SEM vacuum-
quality adhesive, preferably carbon paint. The specimen must be
electrically grounded to the sample holder to minimize specimen
charging. If you are using a vice mechanism or double-sided tape,
make sure the specimen is conductively attached to the holder.
Note:
The sample holder is not directly grounded to the chamber ground
because it is connected to the BNC feed on the chamber door. This
allows to measure the sample current.
C a u t i o n !
Store samples and sample holders in a dry and dust free environment.
Dust on samples can get drawn into the electron column, degrading
imaging and requiring an FEI Customer Service.
INSERTING / EXCHANGING A SPECIMEN
AND / OR A DETECTOR
It is assumed, that the microscope is in the Full operation state (see
Chapter 3). Follow the procedure:
1. Click the Vacuum module / Vent button. The confirmation dialogue
appears.
After a High Voltage switch off, the vacuum system switches off the
pumps and opens the appropriate valves to vent the system. After
a specified venting time the venting valve will close.
Note:
If the venting valve closes before the chamber is at the
atmospheric pressure (the door is not possible to open), click the
Vent button once more to open it again.
If you vent the system in order to change a detector, wait
until the
Status module vacuum icon is grey. Otherwise there is a
risk of a detector assessment malfunction, and as a result the PLA
(see below) is not recognized by the system.
2. When vented, open the specimen chamber and, using lint-free
gloves or tweezers, place a specimen into the specimen holder.
Secure the specimen stub with an appropriate hex-wrench unless
a spring-clip holder has been used.
3. Install any additional detector if it is not already done (see below).
4. Adjust the Eucentric Position (see Chapter 7).
5. Close the specimen chamber door.