MagnaTran 7.1 User’s Manual
Alignment and Calibration
MN-003-1600-00
Setting the Transfer and Process Modules’ T and R Coordinates
Brooks Automation
Revision 2.2
7-17
3.
Using the CDM, put the robot into learn mode so that it can be taught the coor-
dinates for the module.
4.
Using the CDM, extend the robot’s end effector until it approaches the center
of the module’s wafer platform. This may be performed using the JOG feature
or the hand locate feature.
5.
Visually check the end effector’s T (rotational) position to determine whether a
wafer properly centered on the end effector will be centered on the platform. If
not, use the CDM to jog or hand locate the end effector until it is centered on
the platform.
6.
Using the CDM, slowly extend the robot arm in the R (radial) direction until a
wafer properly centered on the end effector will be centered on the platform.
7.
Once the end effector is properly located, use the CDM to store the R (radial)
and T (rotational) axis locations for this station.
NOTE:
Be sure to store the robot position for the R and T axes. Also record and save
the R and T axes locations as displayed on the CDM in
.
8.
Retract the robot’s arms.
9.
Verify the stations are properly taught by perform PICK and PLACE com-
mands.
10.
Remove the wafer from the robots end effector.
