MagnaTran 7.1 User’s Manual
Operation
MN-003-1600-00
Operational Interlocks
Brooks Automation
Revision 2.2
6-25
Description
Station Sensors
WAF_SEN
: Individual monitoring of wafer sensors inputs.
VLV_SEN
: Allows monitoring of the poppet valve when robot is extending. If poppet valve is not closed,
an error message will occur and the robot will stop.
SBIT_SVLV_SEN
: Allows monitoring of the slot valve when robot is extending. If slot valve is closed, an
error message will occur and the robot will stop. A fault response will be given.
RETRACT_SEN
: Individual sensor monitoring of robot retract.
EX_ENABLE
: Individual process module sensor allowing robot to extend.
I/O State OUTPUTS
SVLV_CTRL
: Open and close slot valves using serial operational software commands (as opposed to logic
control i.e. robot actions).
Null indicates bit state is undefined.
DISCRETE_OUT
: Individual OUTPUT monitoring of interlocking devices i.e. vacuum gauges.
NUMERIC_OUT
: Allows monitoring of sensors as a group. Binary number converted to decimal and
presented on multiple consecutive OUTPUT channels.
RETRACT_PIN
: Allows configured slot values to close only when the robot is in the retracted state. HI or
LOW characteristic dependent.
1
1.
CAUTION
The RETRACT_PIN is controlled by the robot motion controller and should not be
set by the user.
Miscellaneous Interlocks
DISCRETE_IN
: Individual INPUT monitoring of interlocking devices i.e. vacuum gauges.
NUMERIC_IN
: Allows monitoring of sensors as a group. Binary number converted to decimal and pre-
sented on multiple consecutive INPUT channels.
EMER_STOP
: Emergency Stop sends the HALT command to the robot. If activated, the signal must be
cleared before executing next move command. Intended for use with a user supplied EMO button.
POWER_IND
: Will be on as long as robot is powered up. Output will be HI or LOW.
UPS_BATTERY_SEN
: NORMAL when battery signal remains high, LOW when signal from the UPS bat-
tery goes low. When signal is LOW, no robot motion is permitted. A warning will be generated upon
robot power up only if the UPS battery is detected low.
MOTION_IND:
Will be on as long as the robot arms are in motion. Output will be HI or LOW.
