MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Go To
Brooks Automation
Revision 2.2
8-33
Go To
Purpose
Moves to a specified station-referenced location. This command performs all inter-
locking necessary to maintain safe wafer handling.
Format
GOTO ([[N] station] [R (EX|RE)] [Z (UP|DN)] [SLOT num]) [MAT (ON|OFF)]
[[ARM] arm]
Arguments
station:
Specifies station number.
Range: 1-16.
The “N” identifier is optional.
R (EX|RE):
Specifies radial position of arm:
EX = extended
RE = retracted.
Z (UP|DN):
Specifies vertical deployment of arm:
UP = up
DN = down.
SLOT num :
Indicates the slot to which the arm should move. Use a value of 1 (or 0)
for a non-slotted station; 1 to n for a slotted station, where n = the num-
ber of slots previously set for the particular station.
MAT:
Indicates the expected material status during active wafer hand-off.
This MAT option is only valid for R_MT type sensors.
For sensor types other than R_MT, if the MAT command is used, the
error “Active option is not supported with RE|EX type sensors” is dis-
played.
ON = Material is present on the end effector
OFF = Material in not present on the end effector
ARM arm:
Indicates the arm that should move. Use a value of A (the default) or B.
If no arm is specified, Arm A will move. The “ARM” identifier is
optional.
