MagnaTran 7.1 User’s Manual
Operation
MN-003-1600-00
Wafer Presence Sensors- Radial Motion
Brooks Automation
Revision 2.2
6-39
R_MT Commands
The following commands are used to create, define and verify the Radial Motion Sen-
sors:
Check Load on page 8-23
Store Station Sensor on page 8-169
Request Station Sensor on page 8-108
Set Radial Motion Sense on page 8-138
Store Radial Motion Sense on page 8-163
Request Radial Motion Sense on page 8-98
Go To on page 8-33
Set Interlock on page 8-128
Request Interlock on page 8-80
The CHECK LOAD operation checks the status of any mapped Extend Enable,
Poppet Valve, or Slot Valve Sensor at each station where it finds a Radial
Motion Sensor. If any valve sensors are blocked, that station will be considered
“Not Available for Check Load” and will cycle to the next station. The CHECK
LOAD command may be used to set the robot arm state to the correct load sta-
tus on power-up or after a failure.
The following commands use R_MT sensing:
Pick on page 8-54
Place on page 8-59
Go To on page 8-33
Transfer on page 8-176
R_MT wafer sensing is available with the GOTO commands only when using
the MAT option. When the MAT option is specified during an Extend or
Retract motion, the robot monitors the R_MT wafer sensor to determine if the
load matches that of the MAT option. If the load status and the expected load
status do not match, an error will be generated. See
for the possible
scenarios of the GOTO command with MAT option.
Table 6-7: GOTO with MAT Option Scenarios
Command
If a wafer is detected,
If a wafer is NOT
detected,
GOTO R EX MAT OFF
GOTO operation is
aborted (soft stop)
1
and
an error is reported
GOTO operation is com-
pleted
