Brooks Automation MagnaTran 7.1, User Manual

Page: 287 / 657

MagnaTran 7.1 User’s Manual Command Reference
MN-003-1600-00 Command Quick Reference Tables
Brooks Automation
Revision 2.2
8-19
Table 8-9: Radial Motion Sensor (R_MT) Commands
Command Description Page #
CHECK LOAD Checks for wafer presence 8-23
RQ R_MT SENSE
LIMITS Requests the sensor window limits of the
Radial Motion Sensor 8-98
SET R_MT SENSE
LIMITS Sets the sensor window limits of the Radial
Motion Sensor 8-138
STORE R_MT SENSE
LIMITS Saves the sensor window limits of the Radial
Motion Sensor 8-163
GOTO MAT Moves arm to a location in “station” coordi-
nates 8-33
RQ STNSENSOR Returns the station sensor parameters 8-108
SET STNSENSOR Define the setup for the specified sensor
including; station assignment, usage type,
and active state 8-147
STORE STNSENSOR Stores the current sensor information 8-169
SET INTLCK Enables or disables interlocking 8-128
Table 8-10: Compatibility Commands
Command Description Page #
SET
COMPATIBILITY Allows backward compatibility of
command usage for the MagnaT-
ran 6 or the VacuTran/MultiTran 5 Appendix D: Robot
Compatibility
RQ
COMPATIBILITY Requests the current compatibility
mode Appendix D: Robot
Compatibility
STORE
COMPATIBILITY Stores the current compatibility
mode Appendix D: Robot
Compatibility