Brooks Automation MagnaTran 7.1, User Manual

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MagnaTran 7.1 User’s Manual Command Reference
MN-003-1600-00 Error Code Reference
Brooks Automation
Revision 2.2
8-191
Verify that power to robot is 24 ±2 VDC.
Inspect robot power cable for proper connection and continuity.
Check all FET’s for short circuits. See Checking for FET Short Circuits on the Theta Driver
Board on page 10-36 .
Error 10022: Error, Z axis overtravel limit reached.
Reissue motion command.
Inspect appropriate Z overtravel limit switch for possible obstruction resulting in switch acti-
vation.
Adjust the Z axis overtravel limit switch. Refer to Z Hard Stop and Overtravel Limit Switch
Adjustment on page 9-53 .
Move robot so that Z overtravel limit switch is not activated. Manually toggle switch to verify
operation. If switch does not toggle, replace Z axis overtravel limit switch.
Replace Z driver board. Refer to Z-Driver Board Replacement on page 9-43 .
Error 10023: Arm actual position impossible, check sync zero.
Determine the sync zero values presently stored in the robot by issuing the command RQ
SYNC ZERO ALL. Record the values.
All robot stations must be retaught after completing the next step: Redefine the home position
to the desired location. Refer to the
Restore the Home Position to the Factory Settings on page
9-71 .
Error 10024: Error, MCC watchdog timed out.
Error 10025: Error, defective R_MT type wafer sensor.
Verify that the radial and theta positions taught for the R_MT type wafer sensor are accurate.
Check host controller software.
Refer to Operational Interlock Related Issues on page 10-20 .
Error 10026: Error, arm load not what expected.
Verify robot application number is correct by issuing the command RQ CONFIG. The correct
application number can be obtained from the Quality Report (QR) that shipped with the robot
or by contacting Brooks Technical Support.
Remove wafer and repeat robot move. If the robot armset moves properly, the wafer is too large
for the robot application number servos.
Error 10028: Error, obstruction encounter for axis.
Inspect for physical obstruction.
Reteach the station to ensure the end effector is not scraping a surface, particularly VCE cas-
sette slots.
Inspect the Z-Driver board. If the part number is 002-4234-01, then verify that a resistor has
been placed on the back of the board. Request TSB-259 from Brooks Automation Technical Sup-
port.
Error 10029: Error, Emergency Stop circuit is active.
Verify that one of the following Motor Interlock Bypass mechanisms is in place:
Motor Interlock Bypass Jumper Block located at designation J7 on the I/O board part