Glossary
MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
G-6
Revision 2.2
Leak Rate:
Measurement of mass flow through an orifice in torr-liters per second.
Leapfrog:
Brooks Automation’s patented same-side dual end effector robot arm
system.
LED:
Light Emitting Diode. LEDs are used to indicate the presence of volt-
ages on the control circuit board, monitor serial communication trans-
missions, and detect substrate presence in cassette slots or slide-out
from the cassette.
Lift:
Movement upwards. For the robot, this is movement of the arm to the
Up position. For the elevator this is movement of the platform to the Up
position.
Linear Rail:
A precision rail used to provide support and direction to a moving
mechanism.
Load Lock:
See
.
Load Port Module:
Factory interface tool meeting SEMI factory interfacing requirements
for open cassettes, SMIF pods, or FOUPs delivered manually or via fac-
tory automated handling systems.
Low Speed:
Usually slightly faster than Homing speed; the speed at which the robot
moves when a substrate is on the end effector. For dual end effector
robots, the speed at which the robot moves along the T or Z axis when a
substrate is present on either or both end effectors, or along the R axis
when a substrate is present on the active arm.
Lower:
Movement downwards. For the robot, this is movement of the arm to
the Down position. For the elevator this is movement of the platform to
the Down position.
LPM:
See
m (microns):
0.001 mm.
Medium Speed:
Only dual end effector robots radial motions have a medium speed
option. The speed at which the dual end effector robot performs radial
motions when the active arm’s end effector has no substrate, but the
inactive arm’s end effector has a substrate.
MTR:
Multi end effector Transport Robot. See
