Glossary
MagnaTran 7.1 User’s Manual
MN-003-1600-00
Brooks Automation
G-4
Revision 2.2
Elevator:
A device used to vertically position a wafer cassette. This is typically
done to position cassette slots at a specific location for wafer transport.
End Effector:
The mechanical device at the end of the robot’s arm that supports the
substrate during transport, see Pan.
EPROM:
Erasable Programmable Read Only Memory. The EPROM is a device
which is used to store the product’s software. The EPROM retains its
memory during power off periods. See
Extend:
Movement outward. For a robot, this is movement of the robot’s arm
outward (away from the robot’s body). For an elevator, this is move-
ment of the platform arm outward (away from the elevator’s body).
Facet:
The area on a Transport Module where Process Modules, or other types
of modules, can be connected for access by the central wafer handler.
Find Bias:
The distance that the elevator platform must move upward to place a
substrate in the substrate present sensor beam for detection.
Flag:
A piece of opaque material that interrupts the beam in an optical sensor
when a moving mechanism reaches a defined point in its travel.
Flag Sensor:
An electronic device which emits an optical beam from one side of a
notch to a detector on the other side of the notch. When a mechanical
flag interrupts the beam, the position of a mechanism is known.
Foreline:
The exhaust line of a vacuum pump in a vacuum system.
Frog Leg:
Brooks Automation’s patented robot arm system.
FOUP:
Front Opening Unified Pods. Refers to front-opening pods designed to
carry 300mm wafers.
FRU:
Field-Replaceable Unit.
Full Step Mode:
An elevator mode in which when commanded to move one step, the
platform will increment by a distance equal to the pitch (distance
between cassette slots).
Gate Valve:
See
High Speed:
Usually the highest speed; the speed at which the robot moves when no
substrate is on the end effector.
High Vacuum:
Pressure ranges from about 10
-4
Torr to 10
-8
Torr.
