Operation
MagnaTran 7.1 User’s Manual
Theory of Operation
MN-003-1600-00
Brooks Automation
6-18
Revision 2.2
The R (radial extension), T (rotational), and the Z (vertical) axis values for each end
effector at each station should be recorded for each type of wafer that will be used
with the system.
NOTE:
The R value, and possibly the other values, may change for different size wafers.
Tables are provided in
Appendix E: User Setting Tables
for recording station values.
Station 1
Station 2
Station 3
Station 4
Station 5
Station 7
Station 8
Station 6
Figure 6-6: Example of Station Coordinate Numbering
