MagnaTran 7.1 User’s Manual
Alignment and Calibration
MN-003-1600-00
Robot Alignment
Brooks Automation
Revision 2.2
7-3
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Dial indicator and base as shown in
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A 6-in. steel ruler graduated in hundredth inches
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The User’s Manual(s) for any devices the robot will interface with
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Eye Protection
Alignment Strategy
A complete and accurate alignment ensures that no part of the robot or of any wafer
contacts any of the systems interior parts, and that no sliding motions occur between
a wafer and any support surfaces. Completing the alignment in the following order
is critical to the final performance of the robot. These adjustments will be made using
the using robot’s Control/Display Module (CDM) and the required controls for any
devices the robot will interface with.
1.
Verify the flatness of the robot’s end effectors.
2.
Adjust the robot’s end effector for planar motion.
3.
Set the robot to the Wafer Transport Plane (WTP).
4.
Set the T and R coordinates for each station, which represents the system’s pro-
cess and transfer modules. If the robot is equipped with the Z axis drive, teach
the Z axis coordinates for each station.
5.
If required, teach arm ‘B’ of the robot all stations.
6.
Final system check-out
NOTE:
Brooks Automation strongly recommends that the user become thoroughly familiar
with the operation of the robot’s CDM before attempting the alignment procedure
as this remote control is used extensively during robot alignment.
CAUTION
There are no safety interlocks available while using the robot’s CDM.
The user is responsible for any damage to the MagnaTran 7 robot or
their system as a result of using the CDM incorrectly.
